Developing an automatic virtual metrology system

Fan Tien Cheng; Hsien Cheng Huang; Chi An Kao

doi:10.1109/TASE.2011.2169405

Developing an automatic virtual metrology system

Fan Tien Cheng, Hsien Cheng Huang, Chi An Kao

Research output: Contribution to journal › Article

55 Citations (Scopus)

Abstract

Virtual Metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. VM has now been designated by the International SEMATECH Manufacturing Initiative and International Technology Roadmap for Semiconductors as one of the focus areas for the next-generation factory realization roadmap of the semiconductor industry. This paper defines the VM automation levels, proposes the concept of automatic virtual metrology (AVM), and develops an AVM system for automatic and fab-wide VM deployment. The example of automatic VM model refreshing for chemical vapor deposition (CVD) tools is also illustrated in this paper. The AVM system has been successfully deployed in a fifth-generation thin-film-transistor-liquid-crystal-display (TFT-LCD) factory in Chi Mei Optoelectronics (CMO), Taiwan.

Original language	English
Article number	6051498
Pages (from-to)	181-188
Number of pages	8
Journal	IEEE Transactions on Automation Science and Engineering
Volume	9
Issue number	1
DOIs	https://doi.org/10.1109/TASE.2011.2169405
Publication status	Published - 2012 Jan 1

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

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10.1109/TASE.2011.2169405

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Cheng, F. T., Huang, H. C., & Kao, C. A. (2012). Developing an automatic virtual metrology system. IEEE Transactions on Automation Science and Engineering, 9(1), 181-188. [6051498]. https://doi.org/10.1109/TASE.2011.2169405

@article{7599dbe2a86b4542ab447ee2fd2a8584,

title = "Developing an automatic virtual metrology system",

abstract = "Virtual Metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. VM has now been designated by the International SEMATECH Manufacturing Initiative and International Technology Roadmap for Semiconductors as one of the focus areas for the next-generation factory realization roadmap of the semiconductor industry. This paper defines the VM automation levels, proposes the concept of automatic virtual metrology (AVM), and develops an AVM system for automatic and fab-wide VM deployment. The example of automatic VM model refreshing for chemical vapor deposition (CVD) tools is also illustrated in this paper. The AVM system has been successfully deployed in a fifth-generation thin-film-transistor-liquid-crystal-display (TFT-LCD) factory in Chi Mei Optoelectronics (CMO), Taiwan.",

author = "Cheng, {Fan Tien} and Huang, {Hsien Cheng} and Kao, {Chi An}",

year = "2012",

month = jan,

day = "1",

doi = "10.1109/TASE.2011.2169405",

language = "English",

volume = "9",

pages = "181--188",

journal = "IEEE Transactions on Automation Science and Engineering",

issn = "1545-5955",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

}

TY - JOUR

T1 - Developing an automatic virtual metrology system

AU - Cheng, Fan Tien

AU - Huang, Hsien Cheng

AU - Kao, Chi An

PY - 2012/1/1

Y1 - 2012/1/1

N2 - Virtual Metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. VM has now been designated by the International SEMATECH Manufacturing Initiative and International Technology Roadmap for Semiconductors as one of the focus areas for the next-generation factory realization roadmap of the semiconductor industry. This paper defines the VM automation levels, proposes the concept of automatic virtual metrology (AVM), and develops an AVM system for automatic and fab-wide VM deployment. The example of automatic VM model refreshing for chemical vapor deposition (CVD) tools is also illustrated in this paper. The AVM system has been successfully deployed in a fifth-generation thin-film-transistor-liquid-crystal-display (TFT-LCD) factory in Chi Mei Optoelectronics (CMO), Taiwan.

AB - Virtual Metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. VM has now been designated by the International SEMATECH Manufacturing Initiative and International Technology Roadmap for Semiconductors as one of the focus areas for the next-generation factory realization roadmap of the semiconductor industry. This paper defines the VM automation levels, proposes the concept of automatic virtual metrology (AVM), and develops an AVM system for automatic and fab-wide VM deployment. The example of automatic VM model refreshing for chemical vapor deposition (CVD) tools is also illustrated in this paper. The AVM system has been successfully deployed in a fifth-generation thin-film-transistor-liquid-crystal-display (TFT-LCD) factory in Chi Mei Optoelectronics (CMO), Taiwan.

UR - http://www.scopus.com/inward/record.url?scp=84855340878&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84855340878&partnerID=8YFLogxK

U2 - 10.1109/TASE.2011.2169405

DO - 10.1109/TASE.2011.2169405

M3 - Article

AN - SCOPUS:84855340878

VL - 9

SP - 181

EP - 188

JO - IEEE Transactions on Automation Science and Engineering

JF - IEEE Transactions on Automation Science and Engineering

SN - 1545-5955

IS - 1

M1 - 6051498

ER -