TY - GEN
T1 - Development and characterization of PZT thick films fabricated by an improved sol-gel method
AU - Hsu, Yi Chu
AU - Kuo, Kuo Ching
AU - Jang, Ling Sheng
PY - 2005
Y1 - 2005
N2 - the development of next-generation portable MEMS (Micro-Electrical- Mechanical systems) call for PZT (lead zirconate titanate oxide) film sensors and actuators with thickness in the range of 1-10 μm. The aim of this project is to fabricate and characterize PZT films with the thickness between 1 and 10 μm by an improved sol-gel method. Two techniques were applied to improve the conventional sol-gel processing: precursor concentration modulation, rapid thermal annealing. Based on the inspection of XRD spectra and SEM, the films of one, two, three, and sixteen coatings from the same sol show the correct crystalline phase. Also the structure and morphology of the synthesized film were dense and crack-free with the thickness between 1 and 10 μm. The characterization methods of the PZT films for the dynamic performance and simulation were developed. The actuation tests demonstrated the silicon cantilever (4 cm × 7 mm × 0.56 mm) could be driven linearly by the PZT film (4 mm × 4 mm × 6.5 μm) at the 1st bending mode of the specimen, 346 Hz, with the amplitude of 240 nm. According to experiments, the frequency of the PZT sensing signal was the same as the driving frequency and the signal strength was proportional to the excitation voltage. This work successfully demonstrates the feasibility of PZT thick films fabricated by the improved sol-gel method.
AB - the development of next-generation portable MEMS (Micro-Electrical- Mechanical systems) call for PZT (lead zirconate titanate oxide) film sensors and actuators with thickness in the range of 1-10 μm. The aim of this project is to fabricate and characterize PZT films with the thickness between 1 and 10 μm by an improved sol-gel method. Two techniques were applied to improve the conventional sol-gel processing: precursor concentration modulation, rapid thermal annealing. Based on the inspection of XRD spectra and SEM, the films of one, two, three, and sixteen coatings from the same sol show the correct crystalline phase. Also the structure and morphology of the synthesized film were dense and crack-free with the thickness between 1 and 10 μm. The characterization methods of the PZT films for the dynamic performance and simulation were developed. The actuation tests demonstrated the silicon cantilever (4 cm × 7 mm × 0.56 mm) could be driven linearly by the PZT film (4 mm × 4 mm × 6.5 μm) at the 1st bending mode of the specimen, 346 Hz, with the amplitude of 240 nm. According to experiments, the frequency of the PZT sensing signal was the same as the driving frequency and the signal strength was proportional to the excitation voltage. This work successfully demonstrates the feasibility of PZT thick films fabricated by the improved sol-gel method.
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M3 - Conference contribution
AN - SCOPUS:33947701520
SN - 0780393155
SN - 9780780393158
T3 - 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
SP - 778
EP - 782
BT - 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
T2 - 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Y2 - 5 July 2005 through 9 July 2005
ER -