Development and characterization of PZT thick films fabricated by an improved sol-gel method

Yi C. Hsu, Kuo Ching Kuo, Ling-Sheng Jang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

the development of next-generation portable MEMS (Micro-Electrical- Mechanical systems) call for PZT (lead zirconate titanate oxide) film sensors and actuators with thickness in the range of 1-10 μm. The aim of this project is to fabricate and characterize PZT films with the thickness between 1 and 10 μm by an improved sol-gel method. Two techniques were applied to improve the conventional sol-gel processing: precursor concentration modulation, rapid thermal annealing. Based on the inspection of XRD spectra and SEM, the films of one, two, three, and sixteen coatings from the same sol show the correct crystalline phase. Also the structure and morphology of the synthesized film were dense and crack-free with the thickness between 1 and 10 μm. The characterization methods of the PZT films for the dynamic performance and simulation were developed. The actuation tests demonstrated the silicon cantilever (4 cm × 7 mm × 0.56 mm) could be driven linearly by the PZT film (4 mm × 4 mm × 6.5 μm) at the 1st bending mode of the specimen, 346 Hz, with the amplitude of 240 nm. According to experiments, the frequency of the PZT sensing signal was the same as the driving frequency and the signal strength was proportional to the excitation voltage. This work successfully demonstrates the feasibility of PZT thick films fabricated by the improved sol-gel method.

Original languageEnglish
Title of host publication2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
Pages778-782
Number of pages5
Volume2005
Publication statusPublished - 2005
Event2005 IEEE International Conference on Robotics and Biomimetics, ROBIO - Shatin, N.T., China
Duration: 2005 Jul 52005 Jul 9

Other

Other2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
CountryChina
CityShatin, N.T.
Period05-07-0505-07-09

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Hsu, Y. C., Kuo, K. C., & Jang, L-S. (2005). Development and characterization of PZT thick films fabricated by an improved sol-gel method. In 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO (Vol. 2005, pp. 778-782). [1708846]