TY - JOUR
T1 - Development and verification of six-degree-of-freedom error measurement system based on geometrical optics for linear stage
AU - Tai, Wei Che
AU - Liu, Chien Sheng
N1 - Funding Information:
The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Grant Nos. MOST 106–2628-E-006–010-MY3 and 110–2221-E-006–126-MY3.
Publisher Copyright:
© 2022, The Author(s), under exclusive licence to Springer-Verlag London Ltd., part of Springer Nature.
PY - 2022/3
Y1 - 2022/3
N2 - In this paper, a six-degree-of-freedom (6DOF) error measurement system based on geometric optics is proposed for linear stages. This measurement system uses an additional linear stage that drags the sensor onto the stage so that the light spot projected on the sensor moves back and forth with the moving stage. This method achieves long-range 6DOF measurement. Compared with commercial laser interferometers, the proposed measurement system has the advantages of a lower cost, a simpler structure, and the capability of measuring 6DOF errors simultaneously. Zemax software was used to simulate the relationships between the 6DOF errors and the values of position-sensitive detectors. MATLAB software was then used to construct the forward and inverse mathematical kinematic models of the optical paths and simplify the models through curve fitting. Finally, to address installation and manufacturing errors, a reverse kinematic mathematical solution was obtained through the use of a six-axis Stewart platform. The proposed measurement system was experimentally implemented on a commercial linear stage to measure the 6DOF errors and verified against results obtained with a commercial interferometer and electronic level.
AB - In this paper, a six-degree-of-freedom (6DOF) error measurement system based on geometric optics is proposed for linear stages. This measurement system uses an additional linear stage that drags the sensor onto the stage so that the light spot projected on the sensor moves back and forth with the moving stage. This method achieves long-range 6DOF measurement. Compared with commercial laser interferometers, the proposed measurement system has the advantages of a lower cost, a simpler structure, and the capability of measuring 6DOF errors simultaneously. Zemax software was used to simulate the relationships between the 6DOF errors and the values of position-sensitive detectors. MATLAB software was then used to construct the forward and inverse mathematical kinematic models of the optical paths and simplify the models through curve fitting. Finally, to address installation and manufacturing errors, a reverse kinematic mathematical solution was obtained through the use of a six-axis Stewart platform. The proposed measurement system was experimentally implemented on a commercial linear stage to measure the 6DOF errors and verified against results obtained with a commercial interferometer and electronic level.
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U2 - 10.1007/s00170-022-08650-1
DO - 10.1007/s00170-022-08650-1
M3 - Article
AN - SCOPUS:85122928709
SN - 0268-3768
VL - 119
SP - 3903
EP - 3916
JO - International Journal of Advanced Manufacturing Technology
JF - International Journal of Advanced Manufacturing Technology
IS - 5-6
ER -