Development of a bridge-microcantilever by cmos process for surface stress measurement

Shih-Ming Yang; Chun Chang; Tsung I. Yin

doi:10.1115/SBC2009-206333

Development of a bridge-microcantilever by cmos process for surface stress measurement

Shih-Ming Yang, Chun Chang, Tsung I. Yin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009
Pages	883-884
Number of pages	2
Edition	PART B
DOIs	https://doi.org/10.1115/SBC2009-206333
Publication status	Published - 2009 Dec 1
Event	11th ASME Summer Bioengineering Conference, SBC2009 - Lake Tahoe, CA, United States Duration: 2009 Jun 17 → 2009 Jun 21

Publication series

Name	Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009
Number	PART B

Other

Other	11th ASME Summer Bioengineering Conference, SBC2009
Country/Territory	United States
City	Lake Tahoe, CA
Period	09-06-17 → 09-06-21

All Science Journal Classification (ASJC) codes

Biotechnology
Bioengineering

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10.1115/SBC2009-206333

Cite this

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title = "Development of a bridge-microcantilever by cmos process for surface stress measurement",

author = "Shih-Ming Yang and Chun Chang and Yin, {Tsung I.}",

year = "2009",

month = dec,

day = "1",

doi = "10.1115/SBC2009-206333",

language = "English",

isbn = "9780791848913",

series = "Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009",

number = "PART B",

pages = "883--884",

booktitle = "Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009",

edition = "PART B",

note = "11th ASME Summer Bioengineering Conference, SBC2009 ; Conference date: 17-06-2009 Through 21-06-2009",

}

Yang, S-M, Chang, C & Yin, TI 2009, Development of a bridge-microcantilever by cmos process for surface stress measurement. in Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009. PART B edn, Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009, no. PART B, pp. 883-884, 11th ASME Summer Bioengineering Conference, SBC2009, Lake Tahoe, CA, United States, 09-06-17. https://doi.org/10.1115/SBC2009-206333

Development of a bridge-microcantilever by cmos process for surface stress measurement. / Yang, Shih-Ming; Chang, Chun; Yin, Tsung I.

Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009. PART B. ed. 2009. p. 883-884 (Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009; No. PART B).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Development of a bridge-microcantilever by cmos process for surface stress measurement

AU - Yang, Shih-Ming

AU - Chang, Chun

AU - Yin, Tsung I.

PY - 2009/12/1

Y1 - 2009/12/1

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U2 - 10.1115/SBC2009-206333

DO - 10.1115/SBC2009-206333

M3 - Conference contribution

AN - SCOPUS:77953752220

SN - 9780791848913

T3 - Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009

SP - 883

EP - 884

BT - Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009

T2 - 11th ASME Summer Bioengineering Conference, SBC2009

Y2 - 17 June 2009 through 21 June 2009

ER -

Development of a bridge-microcantilever by cmos process for surface stress measurement

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Other

All Science Journal Classification (ASJC) codes

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