Fingerprint
Dive into the research topics of 'Development of a bridge-microcantilever by cmos process for surface stress measurement'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Development of a bridge-microcantilever by cmos process for surface stress measurement
Shih-Ming Yang, Chun Chang, Tsung I. Yin
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution