Development of a double-microcantilever for surface stress measurement in microsensors

S. M. Yang, T. I. Yin, C. Chang

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Abstract

Microsensors based on piezoresistive microcantilevers have been proposed to measure the surface stress change from biochemical reaction. However, the sensor performance is adversely influenced by the thermal stress induced during operation. A mechanics model is employed to analyze the piezoresistive microcantilever subject to surface stress and thermal stress loading, and a double-microcantilever design is also developed to improve the measurement sensitivity. The double-microcantilever is composed of a top immobilized cantilever and another bottom sensing cantilever such that the biaxial surface stress in the former can be converted into uniaxial strain in the latter. Analyses show that the sensitivity can be further increased by a higher length ratio and a lower thickness ratio of the two cantilevers. More than two orders of sensitivity increase can be achieved and the induced thermal effect can also be minimized.

Original languageEnglish
Pages (from-to)545-551
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume121
Issue number2
DOIs
Publication statusPublished - 2007 Feb 20

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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