Development of a generic equipment manager for semiconductor manufacturing

Haw Ching Yang, Fan-Tien Cheng, David Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

The purpose of this research is to develop the Generic Equipment Manager (GEMG) which can either operate alone or be integrated with the Manufacturing Execution System (MES). In order to achieve generality and reusability, the governing rules of the GEMG are divided into three independent portions: System/Framework Rules, Business Rules, and Equipment Rules. The System/Framework Rules specify the requirements to become a pluggable component of MES Framework. The Business Rules are company-dependent and are equipment-independent. A Controller Application module, which drive desired Scenarios, is developed to realize the Business Rules. The Equipment Rules are equipment-dependent and are company-independent. These Equipment Rules are achieved by the module of Equipment Driver which compile appropriate Behaviors. Considering reusability, the so-called Generic Equipment Interface (GEI) messages which are fine-grained, company-independent, and equipment-independent are developed to be the communication messages between the Controller Application and Equipment Driver. Therefore, reusability is easily accomplished. Several examples are shown to demonstrate the generality and reusability of the GEMG.

Original languageEnglish
Title of host publicationIEEE Symposium on Emerging Technologies and Factory Automation, ETFA
PublisherIEEE
Pages727-732
Number of pages6
Volume1
Publication statusPublished - 1999
EventProceedings of the 1999 7th IEEE International Conference on Emerging Technologies and Factory Automation (ETFA'99) - Barcelona, Spain
Duration: 1999 Oct 181999 Oct 21

Other

OtherProceedings of the 1999 7th IEEE International Conference on Emerging Technologies and Factory Automation (ETFA'99)
CityBarcelona, Spain
Period99-10-1899-10-21

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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