TY - GEN
T1 - Development of a generic virtual metrology framework
AU - Huang, Hsien Cheng
AU - Su, Yu Chuan
AU - Cheng, Fan Tien
AU - Jian, Jia Mau
PY - 2007
Y1 - 2007
N2 - Virtual metrology (VM) is a technology to predict metrology variables using information about the state of the process for every workpiece. An advanced dual-phase VM scheme possessing the properties of data preprocessing, dual-phase conjecturing, reliance-level evaluating, and similarity-level appraising was proposed by the author. This dual-phase VM scheme is applicable for all the typical VM applications. Among those applications, the one for workpiece-to-workpiece (W2W) advanced process control (APC) is the most critical. For easy implementation and deployment, a generic-virtual-metrology (GVM) framework shall be designed. The purpose of this paper is to develop the GVM framework. By applying this GVM framework, different VM functional modules can be easily implemented and applied for various kinds of VM applications, especially the W2W APC.
AB - Virtual metrology (VM) is a technology to predict metrology variables using information about the state of the process for every workpiece. An advanced dual-phase VM scheme possessing the properties of data preprocessing, dual-phase conjecturing, reliance-level evaluating, and similarity-level appraising was proposed by the author. This dual-phase VM scheme is applicable for all the typical VM applications. Among those applications, the one for workpiece-to-workpiece (W2W) advanced process control (APC) is the most critical. For easy implementation and deployment, a generic-virtual-metrology (GVM) framework shall be designed. The purpose of this paper is to develop the GVM framework. By applying this GVM framework, different VM functional modules can be easily implemented and applied for various kinds of VM applications, especially the W2W APC.
UR - http://www.scopus.com/inward/record.url?scp=38949180899&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38949180899&partnerID=8YFLogxK
U2 - 10.1109/COASE.2007.4341746
DO - 10.1109/COASE.2007.4341746
M3 - Conference contribution
AN - SCOPUS:38949180899
SN - 1424411548
SN - 9781424411542
T3 - Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
SP - 282
EP - 287
BT - Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
T2 - 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
Y2 - 22 September 2007 through 25 September 2007
ER -