Development of a low frequency electrostatic comb-drive energy harvester compatible to SoC design by CMOS process

Geeng Jen Sheu, Shih Ming Yang, Tehsi Lee

Research output: Contribution to journalArticlepeer-review

48 Citations (Scopus)

Abstract

A 3000 μm × 3000 μm × 500 μm in-plane, gap overlap, electrostatic comb-drive operating in charge-constrained cycle is developed to harvest ambient vibration. This is the smallest vibration harvester resonating at 105 Hz, implementable by standard CMOS process and compatible to System-on-Chip (SoC) design. The 2000 μm × 2200 μm × 450 μm (4.9 mg) vibrating mass is made of the CMOS handle layer so as to achieve low frequency operation. Design verifications show that, with the excitation input of 10 μm amplitude at 105 Hz, the harvester can generate an average output power of 0.0924 μW, or equivalent output density 0.021 μW/mm3. The design is the most area-efficient CMOS vibration energy harvester reported to date.

Original languageEnglish
Pages (from-to)70-76
Number of pages7
JournalSensors and Actuators, A: Physical
Volume167
Issue number1
DOIs
Publication statusPublished - 2011 May 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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