Development of a novel 3-degree of freedom hybrid alignment stage

C. H. Liu, W. Y. Jywe, Y. F. Teng, Pei-Yin Chen

Research output: Contribution to journalArticlepeer-review

Abstract

A high precision positioning stage over a large workspace is a fundamental feature of a precision machine. This paper concentrates on the design and manufacturing process of a novel 3 degree of freedom (3-DOF) hybrid alignment stage with high accuracy and multiple DOF for a precision machine. The main purpose of the stage is to provide a micro-translation structure which could improve the positioning accuracy and the practicality. The hybrid alignment stage designed in this paper is a monolithic structure comprising medium carbon steel. The procedure uses the features of a hybrid structure to develop the stage. The 3-DOF hybrid alignment stage consists of a 3-DOF alignment stage and a nano-positioning mechanism. The nano-positioning mechanism is driven by using the piezoelectric actuators. Piezoelectric actuators are known for the in unique features of quick response, high resolution, electrical mechanical coupling efficiency, and low heat. Therefore, 3 piezoelectric actuators are provided to trigger 3 DOF movements for the nano-positioning mechanism.

Original languageEnglish
Pages (from-to)114-119
Number of pages6
JournalAdvanced Science Letters
Volume9
DOIs
Publication statusPublished - 2012 Jul 2

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Health(social science)
  • Mathematics(all)
  • Education
  • Environmental Science(all)
  • Engineering(all)
  • Energy(all)

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