Development of a pad conditioning simulation module with a diamond dresser for CMP applications

Hsiu Ming Yeh, Kuo Shen Chen

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Development of a pad conditioning simulation module with a diamond dresser for CMP applications'. Together they form a unique fingerprint.

Engineering & Materials Science