Development of a Precision Linear and Rotary Stage Technique

Po Yu Chen, Wen Yuh Jywe, Ming Shi Wang

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

In recent years, semiconductor and biotechnology industries have put significant energy into changing linear processing equipment (X-Y-Z) into R2R (roll to roll) processing equipment. The R2R processing equipment can improve the manufacturing efficiency and reduce the cost of equipment. Consequently, angular positioning accuracy has become more important in precision mechanical equipment. This study presents the development of a precision linear and rotary stage technique applied on roller mold processing, composed of a precision rotary stage, a precision linear stage, a piezoelectric compensation stage, an angular encoder (resolution: 0.269 arc-sec per count), a spherical lens measurement system, and a multi-DOF (degree of freedom) laser interferometer measurement system (resolution: 10 nm per count). The system was integrated using a Matlab and dSPACE control interface with the Proportional Integral Derivative controller (PID controller). The compensated control results of the stage's rotary positioning accuracy, eccentric and wobble accuracy, and linear positioning accuracy are about ±0.4 arc-sec, ±5 µm, and ±100 nm respectively.

Original languageEnglish
Pages (from-to)173-178
Number of pages6
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume38
Issue number2
Publication statusPublished - 2017 Apr 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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