Development of a private cloud-based new-generation virtual metrology system

Min Hsiung Hung; Yu Chuan Lin; Hsien Cheng Huang; Chia Chun Tu; Fan Tien Cheng

doi:10.1109/CoASE.2014.6899434

Development of a private cloud-based new-generation virtual metrology system

Min Hsiung Hung, Yu Chuan Lin, Hsien Cheng Huang, Chia Chun Tu, Fan Tien Cheng

Research output: Contribution to journal › Conference article › peer-review

Abstract

Automatic virtual metrology (AVM) is the highest-level technology for VM applications from the perspective of automation. The existing PC-server-based AVM systems suffer several limitations, such as being incapable of parallel processing, having no high-Availability and fault-tolerance consideration, etc. The new model of IT usage and advantage offered by the emerging cloud computing can bring commercial benefits to industries. In this paper, we based on private cloud architecture and virtualization technology to develop a novel cloud-based AVM system for overcoming the shortcomings of the existing AVM system. Integrated test results in a case study applying the AVM system to perform VM tasks for semiconductor equipment show that the proposed cloud-based AVM system could demonstrate a significant performance improvement over the existing PC-based AVM system, while achieving the similar prediction accuracy. This paper can be a useful reference for industrial practitioners to construct cloud-based equipment monitoring systems.

Original language	English
Article number	6899434
Pages (from-to)	910-915
Number of pages	6
Journal	IEEE International Conference on Automation Science and Engineering
Volume	2014-January
DOIs	https://doi.org/10.1109/CoASE.2014.6899434
Publication status	Published - 2014 Jan 1
Event	2014 IEEE International Conference on Automation Science and Engineering, CASE 2014 - Taipei, Taiwan Duration: 2014 Aug 18 → 2014 Aug 22

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/CoASE.2014.6899434

Fingerprint Dive into the research topics of 'Development of a private cloud-based new-generation virtual metrology system'. Together they form a unique fingerprint.

Cite this

@article{9becdad1cc2d4f309e115365acae9a6a,

title = "Development of a private cloud-based new-generation virtual metrology system",

abstract = "Automatic virtual metrology (AVM) is the highest-level technology for VM applications from the perspective of automation. The existing PC-server-based AVM systems suffer several limitations, such as being incapable of parallel processing, having no high-Availability and fault-tolerance consideration, etc. The new model of IT usage and advantage offered by the emerging cloud computing can bring commercial benefits to industries. In this paper, we based on private cloud architecture and virtualization technology to develop a novel cloud-based AVM system for overcoming the shortcomings of the existing AVM system. Integrated test results in a case study applying the AVM system to perform VM tasks for semiconductor equipment show that the proposed cloud-based AVM system could demonstrate a significant performance improvement over the existing PC-based AVM system, while achieving the similar prediction accuracy. This paper can be a useful reference for industrial practitioners to construct cloud-based equipment monitoring systems.",

author = "Hung, {Min Hsiung} and Lin, {Yu Chuan} and Huang, {Hsien Cheng} and Tu, {Chia Chun} and Cheng, {Fan Tien}",

year = "2014",

month = jan,

day = "1",

doi = "10.1109/CoASE.2014.6899434",

language = "English",

volume = "2014-January",

pages = "910--915",

journal = "IEEE International Conference on Automation Science and Engineering",

issn = "2161-8070",

note = "2014 IEEE International Conference on Automation Science and Engineering, CASE 2014 ; Conference date: 18-08-2014 Through 22-08-2014",

}

TY - JOUR

T1 - Development of a private cloud-based new-generation virtual metrology system

AU - Hung, Min Hsiung

AU - Lin, Yu Chuan

AU - Huang, Hsien Cheng

AU - Tu, Chia Chun

AU - Cheng, Fan Tien

PY - 2014/1/1

Y1 - 2014/1/1

N2 - Automatic virtual metrology (AVM) is the highest-level technology for VM applications from the perspective of automation. The existing PC-server-based AVM systems suffer several limitations, such as being incapable of parallel processing, having no high-Availability and fault-tolerance consideration, etc. The new model of IT usage and advantage offered by the emerging cloud computing can bring commercial benefits to industries. In this paper, we based on private cloud architecture and virtualization technology to develop a novel cloud-based AVM system for overcoming the shortcomings of the existing AVM system. Integrated test results in a case study applying the AVM system to perform VM tasks for semiconductor equipment show that the proposed cloud-based AVM system could demonstrate a significant performance improvement over the existing PC-based AVM system, while achieving the similar prediction accuracy. This paper can be a useful reference for industrial practitioners to construct cloud-based equipment monitoring systems.

AB - Automatic virtual metrology (AVM) is the highest-level technology for VM applications from the perspective of automation. The existing PC-server-based AVM systems suffer several limitations, such as being incapable of parallel processing, having no high-Availability and fault-tolerance consideration, etc. The new model of IT usage and advantage offered by the emerging cloud computing can bring commercial benefits to industries. In this paper, we based on private cloud architecture and virtualization technology to develop a novel cloud-based AVM system for overcoming the shortcomings of the existing AVM system. Integrated test results in a case study applying the AVM system to perform VM tasks for semiconductor equipment show that the proposed cloud-based AVM system could demonstrate a significant performance improvement over the existing PC-based AVM system, while achieving the similar prediction accuracy. This paper can be a useful reference for industrial practitioners to construct cloud-based equipment monitoring systems.

UR - http://www.scopus.com/inward/record.url?scp=84939599398&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84939599398&partnerID=8YFLogxK

U2 - 10.1109/CoASE.2014.6899434

DO - 10.1109/CoASE.2014.6899434

M3 - Conference article

AN - SCOPUS:84939599398

VL - 2014-January

SP - 910

EP - 915

JO - IEEE International Conference on Automation Science and Engineering

JF - IEEE International Conference on Automation Science and Engineering

SN - 2161-8070

M1 - 6899434

T2 - 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014

Y2 - 18 August 2014 through 22 August 2014

ER -