Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage

Hsueh Liang Huang, Chien Hung Liu, Wen Yuh Jywe, Ming-Shi Wang, Te Hua Fang

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

In this study, a laser linear encoder with three degrees of freedom (3-DOFs) based on diffraction and interference was developed to measure the linear displacement and two angular errors of a linear moving stage. Parts of the linear motion errors induced from the two angular errors can be calculated by this prototype 3-DOF laser encoder. It was an effective method for online error calculation and compensation to improve precision stage performance. This new function was superior to other laser encoders. The verification results showed that the resolution is 20 nm. It detected displacements relative to an external grating scale with accuracy of about ±150 nm for a measuring range of ±1 mm, and detected the angular errors with related accuracy of about ±1 arc sec for a measuring range of ±100 arc sec.

Original languageEnglish
Article number066103
JournalReview of Scientific Instruments
Volume78
Issue number6
DOIs
Publication statusPublished - 2007 Aug 2

Fingerprint

coders
Measurement errors
degrees of freedom
Lasers
lasers
arcs
Diffraction
prototypes
gratings
interference
diffraction

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

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abstract = "In this study, a laser linear encoder with three degrees of freedom (3-DOFs) based on diffraction and interference was developed to measure the linear displacement and two angular errors of a linear moving stage. Parts of the linear motion errors induced from the two angular errors can be calculated by this prototype 3-DOF laser encoder. It was an effective method for online error calculation and compensation to improve precision stage performance. This new function was superior to other laser encoders. The verification results showed that the resolution is 20 nm. It detected displacements relative to an external grating scale with accuracy of about ±150 nm for a measuring range of ±1 mm, and detected the angular errors with related accuracy of about ±1 arc sec for a measuring range of ±100 arc sec.",
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Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage. / Huang, Hsueh Liang; Liu, Chien Hung; Jywe, Wen Yuh; Wang, Ming-Shi; Fang, Te Hua.

In: Review of Scientific Instruments, Vol. 78, No. 6, 066103, 02.08.2007.

Research output: Contribution to journalArticle

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