Development of a Three-Degrees-of-Freedom Laser Linear Encoder for error measurement of a high precision stage

Chien Hung Liu, Wen Yuh Jywe, Ming-Shi Wang, Hsueh Liang Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The laser linear encoders are widely used as positioning sensor for a precision linear moving stage. In this paper, a Three-Degrees-Of-Freedom Laser Linear Encoder based on diffraction and interference was developed. It can simultaneously measure the linear displacement and two angular errors of a linear moving stage. The displacement is measured using a polarization interference technique and the two angular errors is also measured based on the near-axis optical theorem. This paper has describes a laser linear encoder that can detect displacements relative to an external grating scale with accuracy about 150 nm for a measuring range ±1000 μm and can detect angular errors with accuracy about 1 arsec for a measuring range ±100 arsecs.

Original languageEnglish
Title of host publicationProceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Pages2985-2990
Number of pages6
DOIs
Publication statusPublished - 2007 Dec 1
Event33rd Annual Conference of the IEEE Industrial Electronics Society, IECON - Taipei, Taiwan
Duration: 2007 Nov 52007 Nov 8

Publication series

NameIECON Proceedings (Industrial Electronics Conference)

Other

Other33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
CountryTaiwan
CityTaipei
Period07-11-0507-11-08

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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