Abstract
A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.
| Original language | English |
|---|---|
| Title of host publication | 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 |
| Pages | 662-665 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2010 Nov 29 |
| Event | 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: 2010 Jan 20 → 2010 Jan 23 |
Publication series
| Name | 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 |
|---|
Other
| Other | 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 |
|---|---|
| Country | China |
| City | Xiamen |
| Period | 10-01-20 → 10-01-23 |
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All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering
Cite this
}
Development of an active micromixer by dielectrophrosis particle manipulating. / Yeh, Szu-I; Lee, Ching Jiun; Fan, Yu Jui; Liu, Cheng Peng; Sheen, Horn Jiunn.
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 662-665 5592492 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Development of an active micromixer by dielectrophrosis particle manipulating
AU - Yeh, Szu-I
AU - Lee, Ching Jiun
AU - Fan, Yu Jui
AU - Liu, Cheng Peng
AU - Sheen, Horn Jiunn
PY - 2010/11/29
Y1 - 2010/11/29
N2 - A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.
AB - A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.
UR - http://www.scopus.com/inward/record.url?scp=78649259350&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78649259350&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2010.5592492
DO - 10.1109/NEMS.2010.5592492
M3 - Conference contribution
SN - 9781424465439
T3 - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
SP - 662
EP - 665
BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
ER -