Development of an automatic virtual metrology framework for TFT-LCD industry

Min Hsiung Hung, Hsien Cheng Huang, Haw Ching Yang, Fan Tien Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.

Original languageEnglish
Title of host publication2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
Pages879-884
Number of pages6
DOIs
Publication statusPublished - 2010 Nov 17
Event2010 IEEE International Conference on Automation Science and Engineering, CASE 2010 - Toronto, ON, Canada
Duration: 2010 Aug 212010 Aug 24

Publication series

Name2010 IEEE International Conference on Automation Science and Engineering, CASE 2010

Other

Other2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
CountryCanada
CityToronto, ON
Period10-08-2110-08-24

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

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  • Cite this

    Hung, M. H., Huang, H. C., Yang, H. C., & Cheng, F. T. (2010). Development of an automatic virtual metrology framework for TFT-LCD industry. In 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010 (pp. 879-884). [5584541] (2010 IEEE International Conference on Automation Science and Engineering, CASE 2010). https://doi.org/10.1109/COASE.2010.5584541