Development of an automatic virtual metrology framework for TFT-LCD industry

Min Hsiung Hung, Hsien Cheng Huang, Haw Ching Yang, Fan-Tien Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.

Original languageEnglish
Title of host publication2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
Pages879-884
Number of pages6
DOIs
Publication statusPublished - 2010 Nov 17
Event2010 IEEE International Conference on Automation Science and Engineering, CASE 2010 - Toronto, ON, Canada
Duration: 2010 Aug 212010 Aug 24

Publication series

Name2010 IEEE International Conference on Automation Science and Engineering, CASE 2010

Other

Other2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
CountryCanada
CityToronto, ON
Period10-08-2110-08-24

Fingerprint

Liquid crystal displays
Industry
Graphical user interfaces
Interfaces (computer)
Industrial plants
Monitoring
Testing

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

Cite this

Hung, M. H., Huang, H. C., Yang, H. C., & Cheng, F-T. (2010). Development of an automatic virtual metrology framework for TFT-LCD industry. In 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010 (pp. 879-884). [5584541] (2010 IEEE International Conference on Automation Science and Engineering, CASE 2010). https://doi.org/10.1109/COASE.2010.5584541
Hung, Min Hsiung ; Huang, Hsien Cheng ; Yang, Haw Ching ; Cheng, Fan-Tien. / Development of an automatic virtual metrology framework for TFT-LCD industry. 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010. 2010. pp. 879-884 (2010 IEEE International Conference on Automation Science and Engineering, CASE 2010).
@inproceedings{f5a9f324e9e045d999fbcc5d519ad621,
title = "Development of an automatic virtual metrology framework for TFT-LCD industry",
abstract = "An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.",
author = "Hung, {Min Hsiung} and Huang, {Hsien Cheng} and Yang, {Haw Ching} and Fan-Tien Cheng",
year = "2010",
month = "11",
day = "17",
doi = "10.1109/COASE.2010.5584541",
language = "English",
isbn = "9781424454471",
series = "2010 IEEE International Conference on Automation Science and Engineering, CASE 2010",
pages = "879--884",
booktitle = "2010 IEEE International Conference on Automation Science and Engineering, CASE 2010",

}

Hung, MH, Huang, HC, Yang, HC & Cheng, F-T 2010, Development of an automatic virtual metrology framework for TFT-LCD industry. in 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010., 5584541, 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010, pp. 879-884, 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010, Toronto, ON, Canada, 10-08-21. https://doi.org/10.1109/COASE.2010.5584541

Development of an automatic virtual metrology framework for TFT-LCD industry. / Hung, Min Hsiung; Huang, Hsien Cheng; Yang, Haw Ching; Cheng, Fan-Tien.

2010 IEEE International Conference on Automation Science and Engineering, CASE 2010. 2010. p. 879-884 5584541 (2010 IEEE International Conference on Automation Science and Engineering, CASE 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Development of an automatic virtual metrology framework for TFT-LCD industry

AU - Hung, Min Hsiung

AU - Huang, Hsien Cheng

AU - Yang, Haw Ching

AU - Cheng, Fan-Tien

PY - 2010/11/17

Y1 - 2010/11/17

N2 - An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.

AB - An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.

UR - http://www.scopus.com/inward/record.url?scp=78149418922&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78149418922&partnerID=8YFLogxK

U2 - 10.1109/COASE.2010.5584541

DO - 10.1109/COASE.2010.5584541

M3 - Conference contribution

SN - 9781424454471

T3 - 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010

SP - 879

EP - 884

BT - 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010

ER -

Hung MH, Huang HC, Yang HC, Cheng F-T. Development of an automatic virtual metrology framework for TFT-LCD industry. In 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010. 2010. p. 879-884. 5584541. (2010 IEEE International Conference on Automation Science and Engineering, CASE 2010). https://doi.org/10.1109/COASE.2010.5584541