TY - JOUR
T1 - Development of an AVM System Implementation Framework
AU - Hung, Min Hsiung
AU - Chen, Chun Fang
AU - Huang, Hsien Cheng
AU - Yang, Haw Ching
AU - Cheng, Fan Tien
N1 - Funding Information:
Manuscript received October 10, 2011; revised May 2, 2012; accepted May 28, 2012. Date of publication June 26, 2012; date of current version October 25, 2012. This work was supported in part by the Advanced Institute of Manufacturing with High-Tech Innovations, Taiwan. The work of M.-H. Hung was supported in part by the National Science Council of Republic of China, under Contracts NSC99-2221-E-034-017 and NSC100-2221-E-034-020. The work of F.-T. Cheng was supported in part by the National Science Council of Republic of China, under Contracts NSC99-2221-E-006-233 and NSC100-2622-E-006-011-CC2.
PY - 2012/11
Y1 - 2012/11
N2 - Automatic virtual metrology (AVM) is the highest-level of technology for VM applications from the perspective of automation. It enables the fast application of VM to all pieces of equipment in a factory. The existing VM-related literature mainly focuses on creating VM models for manufacturing processes using different algorithms or methods and illustrating the defect-detection capability or the VM conjecture accuracy. Only a few of them mentioned how to implement the AVM system, but with limited details. This paper aims to present the development of an AVM system implementation framework (AVMSIF) to fill this gap. The proposed AVMSIF, together with the developed server-creation approach and XML-based systemoperational mechanisms, can allow the complex AVM system to be created in a systematic and easy manner. Also, by adopting plug-and-play interfaces and desired functional modules, the AVMSIF can be applied to different types of equipment in the factory-wide VM deployment. According to the proposed AVMSIF, an AVM system has been successfully created and deployed in our cooperative thin-film-transistor-liquid-crystal-display (TFT-LCD) factory to confirm the effectiveness of the proposed AVMSIF. The results of this paper may be a useful reference for high-tech industries, such as semiconductor and TFT-LCD industries, in the construction of their AVM systems.
AB - Automatic virtual metrology (AVM) is the highest-level of technology for VM applications from the perspective of automation. It enables the fast application of VM to all pieces of equipment in a factory. The existing VM-related literature mainly focuses on creating VM models for manufacturing processes using different algorithms or methods and illustrating the defect-detection capability or the VM conjecture accuracy. Only a few of them mentioned how to implement the AVM system, but with limited details. This paper aims to present the development of an AVM system implementation framework (AVMSIF) to fill this gap. The proposed AVMSIF, together with the developed server-creation approach and XML-based systemoperational mechanisms, can allow the complex AVM system to be created in a systematic and easy manner. Also, by adopting plug-and-play interfaces and desired functional modules, the AVMSIF can be applied to different types of equipment in the factory-wide VM deployment. According to the proposed AVMSIF, an AVM system has been successfully created and deployed in our cooperative thin-film-transistor-liquid-crystal-display (TFT-LCD) factory to confirm the effectiveness of the proposed AVMSIF. The results of this paper may be a useful reference for high-tech industries, such as semiconductor and TFT-LCD industries, in the construction of their AVM systems.
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U2 - 10.1109/TSM.2012.2206061
DO - 10.1109/TSM.2012.2206061
M3 - Article
AN - SCOPUS:85008548599
SN - 0894-6507
VL - 25
SP - 598
EP - 613
JO - IEEE Transactions on Semiconductor Manufacturing
JF - IEEE Transactions on Semiconductor Manufacturing
IS - 4
ER -