Development of an object-based equipment controller for semiconductor equipment communications

Jun Yan Deng, Fan Tien Cheng, Kevin Nguyen

Research output: Contribution to conferencePaperpeer-review

3 Citations (Scopus)

Abstract

SEMATECH developed the CIM Framework Specification to facilitate the creation of an integrated, common, flexible, modular object model leading to an open, multi-supplier CIM system environment in the semiconductor industry. However, all the equipment must comply with the SEMI SECS/GEM standards to interface with the CIM Framework's Machine Management Components. SEMI is developing an Object-Based Equipment Model (OBEM) standard to take full advantage of the CIM Framework. With OBEM, the equipment can communicate with the CIM Framework directly by method invocation. This work develops OBEM-compliant object-based equipment (OBE) in the MES Framework environment, such that this equipment can directly communicate with the MES Framework, without using the SECS/GEM protocol. Therefore, a systematic approach for developing this object-based system using object technology is proposed. The Unified Modeling Language (UML) is adopted as the major tool for analyzing and developing the target system. A SECS/GEM adapter is also added on the OBE to enable the OBE to be integrated with a Legacy Factory which can only use SECS/GEM standards. A die bonder is used as example equipment for development demonstrations.

Original languageEnglish
Pages1240-1245
Number of pages6
Publication statusPublished - 1999 Dec 1
EventThe 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99) - San Jose, CA, USA
Duration: 1999 Nov 291999 Dec 3

Other

OtherThe 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99)
CitySan Jose, CA, USA
Period99-11-2999-12-03

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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