TY - JOUR
T1 - Development of geometrically based fabrication emulator for MEMS micromachining and excimer laser ablation
AU - Chen, Kuo Shen
AU - Yeh, Hsiu Ming
N1 - Funding Information:
This work was supported by the National Science
PY - 2008
Y1 - 2008
N2 - Computer aided design (CAD) is a key point in the development of all engineering products for cost reduction and for accelerating the update of products. Unlike mechanical design, which usually yields truly 3-D objects, the 2-D extruded nature of the microelectromechanical systems (MEMS) fabrication process makes it extremely suitable to be represented using an automatic solid modeling flow. In this paper, the relationship between key MEMS fabrication procedures and their corresponding solid modeling functions are first correlated. Based on these correlations, a fabrication process emulator, called the NCKU Z-Fabricator is subsequently developed to emulate MEMS fabrication, and successful microfabrication examples are demonstrated. Finally, the simulation module for a novel multi-user MEMS platform “SMart” and the non-traditional excimer laser ablation process are designed and demonstrated using the Z-Fabricator. Following the correlation and methodology outlined in this paper, it is expected that users will be able to design their own process emulator to customize their own special fabrication requirements and to reduce the cost of software in a more flexible manner.
AB - Computer aided design (CAD) is a key point in the development of all engineering products for cost reduction and for accelerating the update of products. Unlike mechanical design, which usually yields truly 3-D objects, the 2-D extruded nature of the microelectromechanical systems (MEMS) fabrication process makes it extremely suitable to be represented using an automatic solid modeling flow. In this paper, the relationship between key MEMS fabrication procedures and their corresponding solid modeling functions are first correlated. Based on these correlations, a fabrication process emulator, called the NCKU Z-Fabricator is subsequently developed to emulate MEMS fabrication, and successful microfabrication examples are demonstrated. Finally, the simulation module for a novel multi-user MEMS platform “SMart” and the non-traditional excimer laser ablation process are designed and demonstrated using the Z-Fabricator. Following the correlation and methodology outlined in this paper, it is expected that users will be able to design their own process emulator to customize their own special fabrication requirements and to reduce the cost of software in a more flexible manner.
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U2 - 10.1080/02533839.2008.9671358
DO - 10.1080/02533839.2008.9671358
M3 - Article
AN - SCOPUS:38949171416
VL - 31
SP - 41
EP - 51
JO - Chung-kuo Kung Ch'eng Hsueh K'an/Journal of the Chinese Institute of Engineers
JF - Chung-kuo Kung Ch'eng Hsueh K'an/Journal of the Chinese Institute of Engineers
SN - 0253-3839
IS - 1
ER -