TY - GEN
T1 - Development of precise autofocusing microscope based on reduction of geometrical fluctuations
AU - Liu, Chien Sheng
AU - Lin, Kun Wei
AU - Jiang, Sheng Hong
PY - 2012
Y1 - 2012
N2 - In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise autofocusing microscope systems for the inspection processes in mass production lines. Accordingly, a precise autofocusing microscope is proposed based on the reduction of the geometrical fluctuations of a laser light source, in which, the geometrical fluctuations of the laser light source are reduced via an optical diffuser. An autofocusing capability of proposed system is achieved by using position feedback signals from the centroid (xcentroid, ycentroid) of the image of the reflected laser beam captured from a CCD sensor. The experimental results show that the proposed system has a positioning accuracy of 1.5 μm with a working range of ±200 μm. Compared to conventional centroid method, it is shown that our proposed system has improved autofocusing positioning accuracy.
AB - In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise autofocusing microscope systems for the inspection processes in mass production lines. Accordingly, a precise autofocusing microscope is proposed based on the reduction of the geometrical fluctuations of a laser light source, in which, the geometrical fluctuations of the laser light source are reduced via an optical diffuser. An autofocusing capability of proposed system is achieved by using position feedback signals from the centroid (xcentroid, ycentroid) of the image of the reflected laser beam captured from a CCD sensor. The experimental results show that the proposed system has a positioning accuracy of 1.5 μm with a working range of ±200 μm. Compared to conventional centroid method, it is shown that our proposed system has improved autofocusing positioning accuracy.
UR - http://www.scopus.com/inward/record.url?scp=84869402044&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869402044&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84869402044
SN - 9781467322591
T3 - Proceedings of the SICE Annual Conference
SP - 967
EP - 972
BT - 2012 Proceedings of SICE Annual Conference, SICE 2012
PB - Society of Instrument and Control Engineers (SICE)
T2 - 2012 51st Annual Conference on of the Society of Instrument and Control Engineers of Japan, SICE 2012
Y2 - 20 August 2012 through 23 August 2012
ER -