Development of precise autofocusing microscope based on reduction of geometrical fluctuations

Chien Sheng Liu, Kun Wei Lin, Sheng Hong Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise autofocusing microscope systems for the inspection processes in mass production lines. Accordingly, a precise autofocusing microscope is proposed based on the reduction of the geometrical fluctuations of a laser light source, in which, the geometrical fluctuations of the laser light source are reduced via an optical diffuser. An autofocusing capability of proposed system is achieved by using position feedback signals from the centroid (xcentroid, ycentroid) of the image of the reflected laser beam captured from a CCD sensor. The experimental results show that the proposed system has a positioning accuracy of 1.5 μm with a working range of ±200 μm. Compared to conventional centroid method, it is shown that our proposed system has improved autofocusing positioning accuracy.

Original languageEnglish
Title of host publication2012 Proceedings of SICE Annual Conference, SICE 2012
PublisherSociety of Instrument and Control Engineers (SICE)
Pages967-972
Number of pages6
ISBN (Print)9781467322591
Publication statusPublished - 2012 Jan 1
Event2012 51st Annual Conference on of the Society of Instrument and Control Engineers of Japan, SICE 2012 - Akita, Japan
Duration: 2012 Aug 202012 Aug 23

Publication series

NameProceedings of the SICE Annual Conference

Other

Other2012 51st Annual Conference on of the Society of Instrument and Control Engineers of Japan, SICE 2012
CountryJapan
CityAkita
Period12-08-2012-08-23

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering

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  • Cite this

    Liu, C. S., Lin, K. W., & Jiang, S. H. (2012). Development of precise autofocusing microscope based on reduction of geometrical fluctuations. In 2012 Proceedings of SICE Annual Conference, SICE 2012 (pp. 967-972). [6318581] (Proceedings of the SICE Annual Conference). Society of Instrument and Control Engineers (SICE).