Development of the nano-measuring machine stage

Wen Yuh Jywe; Yeau Ren Jeng; Yun Feng Teng; Hung Shu Wang; Chia Hung Wu

doi:10.1109/IECON.2007.4460035

Development of the nano-measuring machine stage

Wen Yuh Jywe, Yeau Ren Jeng, Yun Feng Teng, Hung Shu Wang, Chia Hung Wu

Department of Biomedical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor.

Original language	English
Title of host publication	Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Pages	2970-2973
Number of pages	4
DOIs	https://doi.org/10.1109/IECON.2007.4460035
Publication status	Published - 2007 Dec 1
Event	33rd Annual Conference of the IEEE Industrial Electronics Society, IECON - Taipei, Taiwan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	IECON Proceedings (Industrial Electronics Conference)

Other

Other	33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Country/Territory	Taiwan
City	Taipei
Period	07-11-05 → 07-11-08

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/IECON.2007.4460035

Cite this

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title = "Development of the nano-measuring machine stage",

abstract = "In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor.",

author = "Jywe, {Wen Yuh} and Jeng, {Yeau Ren} and Teng, {Yun Feng} and Wang, {Hung Shu} and Wu, {Chia Hung}",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/IECON.2007.4460035",

language = "English",

isbn = "1424407834",

series = "IECON Proceedings (Industrial Electronics Conference)",

pages = "2970--2973",

booktitle = "Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON",

note = "33rd Annual Conference of the IEEE Industrial Electronics Society, IECON ; Conference date: 05-11-2007 Through 08-11-2007",

}

Jywe, WY, Jeng, YR, Teng, YF, Wang, HS & Wu, CH 2007, Development of the nano-measuring machine stage. in Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON., 4460035, IECON Proceedings (Industrial Electronics Conference), pp. 2970-2973, 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON, Taipei, Taiwan, 07-11-05. https://doi.org/10.1109/IECON.2007.4460035

Development of the nano-measuring machine stage. / Jywe, Wen Yuh; Jeng, Yeau Ren; Teng, Yun Feng; Wang, Hung Shu; Wu, Chia Hung.

Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON. 2007. p. 2970-2973 4460035 (IECON Proceedings (Industrial Electronics Conference)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Development of the nano-measuring machine stage

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