Abstract
In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON |
| Pages | 2970-2973 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2007 Dec 1 |
| Event | 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON - Taipei, Taiwan Duration: 2007 Nov 5 → 2007 Nov 8 |
Publication series
| Name | IECON Proceedings (Industrial Electronics Conference) |
|---|
Other
| Other | 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON |
|---|---|
| Country | Taiwan |
| City | Taipei |
| Period | 07-11-05 → 07-11-08 |
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All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering
Cite this
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Development of the nano-measuring machine stage. / Jywe, Wen Yuh; Jeng, Yeau-Ren; Teng, Yun Feng; Wang, Hung Shu; Wu, Chia Hung.
Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON. 2007. p. 2970-2973 4460035 (IECON Proceedings (Industrial Electronics Conference)).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Development of the nano-measuring machine stage
AU - Jywe, Wen Yuh
AU - Jeng, Yeau-Ren
AU - Teng, Yun Feng
AU - Wang, Hung Shu
AU - Wu, Chia Hung
PY - 2007/12/1
Y1 - 2007/12/1
N2 - In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor.
AB - In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor.
UR - http://www.scopus.com/inward/record.url?scp=49949093650&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=49949093650&partnerID=8YFLogxK
U2 - 10.1109/IECON.2007.4460035
DO - 10.1109/IECON.2007.4460035
M3 - Conference contribution
SN - 1424407834
SN - 9781424407835
T3 - IECON Proceedings (Industrial Electronics Conference)
SP - 2970
EP - 2973
BT - Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
ER -