TY - GEN
T1 - Development of the nano-measuring machine stage
AU - Jywe, Wen Yuh
AU - Jeng, Yeau Ren
AU - Teng, Yun Feng
AU - Wang, Hung Shu
AU - Wu, Chia Hung
PY - 2007/12/1
Y1 - 2007/12/1
N2 - In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor.
AB - In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor.
UR - http://www.scopus.com/inward/record.url?scp=49949093650&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=49949093650&partnerID=8YFLogxK
U2 - 10.1109/IECON.2007.4460035
DO - 10.1109/IECON.2007.4460035
M3 - Conference contribution
AN - SCOPUS:49949093650
SN - 1424407834
SN - 9781424407835
T3 - IECON Proceedings (Industrial Electronics Conference)
SP - 2970
EP - 2973
BT - Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
T2 - 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Y2 - 5 November 2007 through 8 November 2007
ER -