Diamond and carbon nanotubes and their applications to MEMS and NEMS

Yon-Hua Tzeng, Y. K. Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Outstanding mechanical, thermal, optical, chemical, electrical, and biocompatible properties of diamond and carbon nanotubes, and their implication to and current status of practical applications to Micro- and Nano-Electro-Mechanical Systems (MEMS/NEMS) are discussed. State-of-the-art manufacturing technologies for these materials and related processes for fabrication of high performance MEMS and NEMS are presented.

Original languageEnglish
Title of host publicationProceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Pages699-704
Number of pages6
DOIs
Publication statusPublished - 2005 Dec 1
Event2005 IEEE International Conference on Mechatronics, ICM '05 - Taipei, Taiwan
Duration: 2005 Jul 102005 Jul 12

Publication series

NameProceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Volume2005

Other

Other2005 IEEE International Conference on Mechatronics, ICM '05
CountryTaiwan
CityTaipei
Period05-07-1005-07-12

Fingerprint

NEMS
MEMS
Diamonds
Carbon nanotubes
Fabrication
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Tzeng, Y-H., & Liu, Y. K. (2005). Diamond and carbon nanotubes and their applications to MEMS and NEMS. In Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05 (pp. 699-704). [1529346] (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05; Vol. 2005). https://doi.org/10.1109/ICMECH.2005.1529346
Tzeng, Yon-Hua ; Liu, Y. K. / Diamond and carbon nanotubes and their applications to MEMS and NEMS. Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05. 2005. pp. 699-704 (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05).
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abstract = "Outstanding mechanical, thermal, optical, chemical, electrical, and biocompatible properties of diamond and carbon nanotubes, and their implication to and current status of practical applications to Micro- and Nano-Electro-Mechanical Systems (MEMS/NEMS) are discussed. State-of-the-art manufacturing technologies for these materials and related processes for fabrication of high performance MEMS and NEMS are presented.",
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Tzeng, Y-H & Liu, YK 2005, Diamond and carbon nanotubes and their applications to MEMS and NEMS. in Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05., 1529346, Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05, vol. 2005, pp. 699-704, 2005 IEEE International Conference on Mechatronics, ICM '05, Taipei, Taiwan, 05-07-10. https://doi.org/10.1109/ICMECH.2005.1529346

Diamond and carbon nanotubes and their applications to MEMS and NEMS. / Tzeng, Yon-Hua; Liu, Y. K.

Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05. 2005. p. 699-704 1529346 (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Tzeng Y-H, Liu YK. Diamond and carbon nanotubes and their applications to MEMS and NEMS. In Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05. 2005. p. 699-704. 1529346. (Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05). https://doi.org/10.1109/ICMECH.2005.1529346