TY - GEN
T1 - Diamond and carbon nanotubes and their applications to MEMS and NEMS
AU - Tzeng, Y.
AU - Liu, Y. K.
PY - 2005
Y1 - 2005
N2 - Outstanding mechanical, thermal, optical, chemical, electrical, and biocompatible properties of diamond and carbon nanotubes, and their implication to and current status of practical applications to Micro- and Nano-Electro-Mechanical Systems (MEMS/NEMS) are discussed. State-of-the-art manufacturing technologies for these materials and related processes for fabrication of high performance MEMS and NEMS are presented.
AB - Outstanding mechanical, thermal, optical, chemical, electrical, and biocompatible properties of diamond and carbon nanotubes, and their implication to and current status of practical applications to Micro- and Nano-Electro-Mechanical Systems (MEMS/NEMS) are discussed. State-of-the-art manufacturing technologies for these materials and related processes for fabrication of high performance MEMS and NEMS are presented.
UR - https://www.scopus.com/pages/publications/33748894510
UR - https://www.scopus.com/pages/publications/33748894510#tab=citedBy
U2 - 10.1109/ICMECH.2005.1529346
DO - 10.1109/ICMECH.2005.1529346
M3 - Conference contribution
AN - SCOPUS:33748894510
SN - 0780389980
SN - 9780780389984
T3 - Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
SP - 699
EP - 704
BT - Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
T2 - 2005 IEEE International Conference on Mechatronics, ICM '05
Y2 - 10 July 2005 through 12 July 2005
ER -