Diamond-like carbon nanocomposite films

Liang Yih Chen; Franklin Chau Nan Hong

doi:10.1063/1.1576909

Diamond-like carbon nanocomposite films

Liang Yih Chen, Franklin Chau Nan Hong

Department of Chemical Engineering

Research output: Contribution to journal › Article › peer-review

66 Citations (Scopus)

Abstract

The inductively coupled plasma chemical vapor deposition of diamond-like carbon (DLC) nanocomposite films at room temperature by using hexamethyldisilane (HMDS), hexamethyldisilazane(HMDSN) and hexamethyldisloxane(HMDSO) was discussed. It was found that the DLC nanocomposite films deposited by HMDS contained hollow spherical nanocrystallites called nanoballs, of hexagonal silicon carbide. It was observed that the DLC nanocomposite films exhibit much lower compressive stresses than the DLC films deposited by methane.

Original language	English
Pages (from-to)	3526-3528
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	20
DOIs	https://doi.org/10.1063/1.1576909
Publication status	Published - 2003 May 19

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.1576909

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AB - The inductively coupled plasma chemical vapor deposition of diamond-like carbon (DLC) nanocomposite films at room temperature by using hexamethyldisilane (HMDS), hexamethyldisilazane(HMDSN) and hexamethyldisloxane(HMDSO) was discussed. It was found that the DLC nanocomposite films deposited by HMDS contained hollow spherical nanocrystallites called nanoballs, of hexagonal silicon carbide. It was observed that the DLC nanocomposite films exhibit much lower compressive stresses than the DLC films deposited by methane.

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Diamond-like carbon nanocomposite films

Abstract

All Science Journal Classification (ASJC) codes

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