Diamond-like carbon nanocomposite films

Liang Yih Chen, Franklin Chau Nan Hong

Research output: Contribution to journalArticlepeer-review

64 Citations (Scopus)

Abstract

The inductively coupled plasma chemical vapor deposition of diamond-like carbon (DLC) nanocomposite films at room temperature by using hexamethyldisilane (HMDS), hexamethyldisilazane(HMDSN) and hexamethyldisloxane(HMDSO) was discussed. It was found that the DLC nanocomposite films deposited by HMDS contained hollow spherical nanocrystallites called nanoballs, of hexagonal silicon carbide. It was observed that the DLC nanocomposite films exhibit much lower compressive stresses than the DLC films deposited by methane.

Original languageEnglish
Pages (from-to)3526-3528
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number20
DOIs
Publication statusPublished - 2003 May 19

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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