Diamond-like carbon nanocomposite films

Liang Yih Chen; Franklin Chau Nan Hong

doi:10.1063/1.1576909

Diamond-like carbon nanocomposite films

Liang Yih Chen, Franklin Chau Nan Hong

Department of Chemical Engineering

Research output: Contribution to journal › Article › peer-review

64 Citations (Scopus)

Abstract

The inductively coupled plasma chemical vapor deposition of diamond-like carbon (DLC) nanocomposite films at room temperature by using hexamethyldisilane (HMDS), hexamethyldisilazane(HMDSN) and hexamethyldisloxane(HMDSO) was discussed. It was found that the DLC nanocomposite films deposited by HMDS contained hollow spherical nanocrystallites called nanoballs, of hexagonal silicon carbide. It was observed that the DLC nanocomposite films exhibit much lower compressive stresses than the DLC films deposited by methane.

Original language	English
Pages (from-to)	3526-3528
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	20
DOIs	https://doi.org/10.1063/1.1576909
Publication status	Published - 2003 May 19

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1576909

Fingerprint Dive into the research topics of 'Diamond-like carbon nanocomposite films'. Together they form a unique fingerprint.

Cite this

@article{6f9aa68e1f6c4149aefd1ac87db9f266,

title = "Diamond-like carbon nanocomposite films",

abstract = "The inductively coupled plasma chemical vapor deposition of diamond-like carbon (DLC) nanocomposite films at room temperature by using hexamethyldisilane (HMDS), hexamethyldisilazane(HMDSN) and hexamethyldisloxane(HMDSO) was discussed. It was found that the DLC nanocomposite films deposited by HMDS contained hollow spherical nanocrystallites called nanoballs, of hexagonal silicon carbide. It was observed that the DLC nanocomposite films exhibit much lower compressive stresses than the DLC films deposited by methane.",

author = "Chen, {Liang Yih} and Hong, {Franklin Chau Nan}",

year = "2003",

month = may,

day = "19",

doi = "10.1063/1.1576909",

language = "English",

volume = "82",

pages = "3526--3528",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "20",

}

TY - JOUR

T1 - Diamond-like carbon nanocomposite films

AU - Chen, Liang Yih

AU - Hong, Franklin Chau Nan

PY - 2003/5/19

Y1 - 2003/5/19

N2 - The inductively coupled plasma chemical vapor deposition of diamond-like carbon (DLC) nanocomposite films at room temperature by using hexamethyldisilane (HMDS), hexamethyldisilazane(HMDSN) and hexamethyldisloxane(HMDSO) was discussed. It was found that the DLC nanocomposite films deposited by HMDS contained hollow spherical nanocrystallites called nanoballs, of hexagonal silicon carbide. It was observed that the DLC nanocomposite films exhibit much lower compressive stresses than the DLC films deposited by methane.

AB - The inductively coupled plasma chemical vapor deposition of diamond-like carbon (DLC) nanocomposite films at room temperature by using hexamethyldisilane (HMDS), hexamethyldisilazane(HMDSN) and hexamethyldisloxane(HMDSO) was discussed. It was found that the DLC nanocomposite films deposited by HMDS contained hollow spherical nanocrystallites called nanoballs, of hexagonal silicon carbide. It was observed that the DLC nanocomposite films exhibit much lower compressive stresses than the DLC films deposited by methane.

UR - http://www.scopus.com/inward/record.url?scp=0037711194&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037711194&partnerID=8YFLogxK

U2 - 10.1063/1.1576909

DO - 10.1063/1.1576909

M3 - Article

AN - SCOPUS:0037711194

VL - 82

SP - 3526

EP - 3528

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 20

ER -