The inductively coupled plasma chemical vapor deposition of diamond-like carbon (DLC) nanocomposite films at room temperature by using hexamethyldisilane (HMDS), hexamethyldisilazane(HMDSN) and hexamethyldisloxane(HMDSO) was discussed. It was found that the DLC nanocomposite films deposited by HMDS contained hollow spherical nanocrystallites called nanoballs, of hexagonal silicon carbide. It was observed that the DLC nanocomposite films exhibit much lower compressive stresses than the DLC films deposited by methane.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)