Dielectric isolated FinFETs on bulk substrate

Darsen Lu, Kangguo Cheng, Pierre Morin, Nicolas Loubet, Terence Hook, Dechao Guo, Ali Khakifirooz, Phil Oldiges, Bruce Doris, Ken Rim, Ajey Jacob, Huiming Bu, Mukesh Khare

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479974382
DOIs
Publication statusPublished - 2014 Jan 30
Event2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014 - Millbrae, United States
Duration: 2014 Oct 62014 Oct 9

Publication series

Name2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014

Other

Other2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014
CountryUnited States
CityMillbrae
Period14-10-0614-10-09

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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