Dielectric isolated FinFETs on bulk substrate

Darsen Lu; Kangguo Cheng; Pierre Morin; Nicolas Loubet; Terence Hook; Dechao Guo; Ali Khakifirooz; Phil Oldiges; Bruce Doris; Ken Rim; Ajey Jacob; Huiming Bu; Mukesh Khare

doi:10.1109/S3S.2014.7028188

Dielectric isolated FinFETs on bulk substrate

Darsen Lu, Kangguo Cheng, Pierre Morin, Nicolas Loubet, Terence Hook, Dechao Guo, Ali Khakifirooz, Phil Oldiges, Bruce Doris, Ken Rim, Ajey Jacob, Huiming Bu, Mukesh Khare

Institute of Microelectronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479974382
DOIs	https://doi.org/10.1109/S3S.2014.7028188
Publication status	Published - 2014 Jan 30
Event	2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014 - Millbrae, United States Duration: 2014 Oct 6 → 2014 Oct 9

Publication series

Name	2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014

Other

Other	2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014
Country/Territory	United States
City	Millbrae
Period	14-10-06 → 14-10-09

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/S3S.2014.7028188

Cite this

Lu, D., Cheng, K., Morin, P., Loubet, N., Hook, T., Guo, D., Khakifirooz, A., Oldiges, P., Doris, B., Rim, K., Jacob, A., Bu, H., & Khare, M. (2014). Dielectric isolated FinFETs on bulk substrate. In 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014 Article 7028188 (2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/S3S.2014.7028188

@inproceedings{8f7bcb5ec9d64d3da1109f8b0d18ebea,

title = "Dielectric isolated FinFETs on bulk substrate",

author = "Darsen Lu and Kangguo Cheng and Pierre Morin and Nicolas Loubet and Terence Hook and Dechao Guo and Ali Khakifirooz and Phil Oldiges and Bruce Doris and Ken Rim and Ajey Jacob and Huiming Bu and Mukesh Khare",

year = "2014",

month = jan,

day = "30",

doi = "10.1109/S3S.2014.7028188",

language = "English",

series = "2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014",

address = "United States",

note = "2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014 ; Conference date: 06-10-2014 Through 09-10-2014",

}

Lu, D, Cheng, K, Morin, P, Loubet, N, Hook, T, Guo, D, Khakifirooz, A, Oldiges, P, Doris, B, Rim, K, Jacob, A, Bu, H & Khare, M 2014, Dielectric isolated FinFETs on bulk substrate. in 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014., 7028188, 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014, Institute of Electrical and Electronics Engineers Inc., 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014, Millbrae, United States, 14-10-06. https://doi.org/10.1109/S3S.2014.7028188

Dielectric isolated FinFETs on bulk substrate. / Lu, Darsen; Cheng, Kangguo; Morin, Pierre et al.
2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014. Institute of Electrical and Electronics Engineers Inc., 2014. 7028188 (2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Dielectric isolated FinFETs on bulk substrate

AU - Lu, Darsen

AU - Cheng, Kangguo

AU - Morin, Pierre

AU - Loubet, Nicolas

AU - Hook, Terence

AU - Guo, Dechao

AU - Khakifirooz, Ali

AU - Oldiges, Phil

AU - Doris, Bruce

AU - Rim, Ken

AU - Jacob, Ajey

AU - Bu, Huiming

AU - Khare, Mukesh

PY - 2014/1/30

Y1 - 2014/1/30

UR - http://www.scopus.com/inward/record.url?scp=84946688487&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84946688487&partnerID=8YFLogxK

U2 - 10.1109/S3S.2014.7028188

DO - 10.1109/S3S.2014.7028188

M3 - Conference contribution

AN - SCOPUS:84946688487

T3 - 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014

BT - 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014

Y2 - 6 October 2014 through 9 October 2014

ER -

Lu D, Cheng K, Morin P, Loubet N, Hook T, Guo D et al. Dielectric isolated FinFETs on bulk substrate. In 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014. Institute of Electrical and Electronics Engineers Inc. 2014. 7028188. (2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2014). doi: 10.1109/S3S.2014.7028188

Dielectric isolated FinFETs on bulk substrate

Publication series

Other

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Cite this