TY - JOUR
T1 - Diffusion barrier properties of amorphous ZrCN films for copper metallization
AU - Chen, Cheng Shi
AU - Liu, Chuan Pu
N1 - Funding Information:
The work is supported by National Science Counsel, Taiwan under the project number of NSC92-2216-E006-030. We are grateful for the use of the sputter equipment in the Semiconductor Lab, which is supported and maintained by the Department of Materials Science and Engineering at National Cheng-Kung University, Taiwan.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005/12/1
Y1 - 2005/12/1
N2 - A novel amorphous zirconium carbon nitrides (ZrCN) material was deposited by reactive sputtering using a ZrC target (99.5% in purity) in a mixture of Ar and N2 ambient. The microstructure and mechanical properties of the ZrCN films were examined with respect to N2 pressure. For thermal stability characterization, the stacked structure of Cu/ZrCN/Si was subsequently subject to thermal treatments at temperatures from 300 °C to 900 °C for 30 min in a vacuum tube with the base pressure of 3 × 10-5 torr. The results show that the amorphous ZrCN films exhibit superior mechanical properties to either ZrN or ZrC including hardness and elastic modulus. The stacked samples were shown to be thermally stable up to about 800 °C from Auger electron spectroscopy and X-ray diffraction, where the ZrCN still remains its amorphous phase. The device completely fails at 900 °C and the mechanism is discussed in the paper.
AB - A novel amorphous zirconium carbon nitrides (ZrCN) material was deposited by reactive sputtering using a ZrC target (99.5% in purity) in a mixture of Ar and N2 ambient. The microstructure and mechanical properties of the ZrCN films were examined with respect to N2 pressure. For thermal stability characterization, the stacked structure of Cu/ZrCN/Si was subsequently subject to thermal treatments at temperatures from 300 °C to 900 °C for 30 min in a vacuum tube with the base pressure of 3 × 10-5 torr. The results show that the amorphous ZrCN films exhibit superior mechanical properties to either ZrN or ZrC including hardness and elastic modulus. The stacked samples were shown to be thermally stable up to about 800 °C from Auger electron spectroscopy and X-ray diffraction, where the ZrCN still remains its amorphous phase. The device completely fails at 900 °C and the mechanism is discussed in the paper.
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U2 - 10.1016/j.jnoncrysol.2005.09.032
DO - 10.1016/j.jnoncrysol.2005.09.032
M3 - Article
AN - SCOPUS:27844496673
SN - 0022-3093
VL - 351
SP - 3725
EP - 3729
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
IS - 49-51
ER -