A pattern of amorphous carbon films was deposited on the substrate in a single step with no special pre- or post-treatment of either the substrate or the patterned films. The deposition was done using a thin electrode and controlling its movement with radio frequency power supply. The morphology, composition, and microstructure of the patterned carbon deposits were characterized by laser microscopy and Raman spectroscopy. The Raman spectrum showed two major broad peaks centered around 1590 cm-1 and 1370 cm-1, characterizing amorphous carbon.
All Science Journal Classification (ASJC) codes
- Materials Science(all)