Direct CoSi2 thin-film formation with homogeneous nanograin-size distribution by oxide-mediated silicidation

Juin Jie Chang, Chuan Pu Liu, Shih Wei Chen, Chih Chia Chang, Tsung Eong Hsieh, Ying Lang Wang

Research output: Contribution to journalArticle

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)2299-2302
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number5
Publication statusPublished - 2004 Jan 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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