Direct growth of high-quality InxGa1-xAs strained layers on misoriented GaAs substrates grown by metalorganic chemical vapor deposition

Chin I. Liao, Kao Feng Yarn, Chien Lien Lin, Yeong Her Wang

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

A new method to directly grow InxGa1-xAs strained layers, instead of using graded buffer layers, on misoriented GaAs (1 0 0) substrates by 10° towards (1 1 1)A while maintaining low interface dislocations, high crystal quality, and uniform and mirror like surfaces of the layers grown by metalorganic chemical vapor deposition (MOCVD) is presented. The large lattice defects existing between InxGa1-xAs and GaAs layers which lead to numerous interface dislocations and rough surface areas have been suppressed successfully by accurate control of growth temperature, growth rates, and the group III and V partial pressures with the V/III ratio of at least 91. The surface roughness is less than 1 nm as measured by atomic force microscopy (AFM). Lower interface dislocations can be observed by transmission electron microscopy (TEM). High crystal quality compared with that in previous studies is measured by an X-ray diffractometer (XRD). The mirror like surface is characterized by optical microscopy.

Original languageEnglish
Pages (from-to)1247-1252
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume41
Issue number3 A
DOIs
Publication statusPublished - 2002 Mar

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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