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Direct growth of single-crystalline III-V semiconductors on amorphous substrates

  • Kevin Chen
  • , Rehan Kapadia
  • , Audrey Harker
  • , Sujay Desai
  • , Jeong Seuk Kang
  • , Steven Chuang
  • , Mahmut Tosun
  • , Carolin M. Sutter-Fella
  • , Michael Tsang
  • , Yuping Zeng
  • , Daisuke Kiriya
  • , Jubin Hazra
  • , Surabhi Rao Madhvapathy
  • , Mark Hettick
  • , Yu Ze Chen
  • , James Mastandrea
  • , Matin Amani
  • , Stefano Cabrini
  • , Yu Lun Chueh
  • , Joel W. Ager
  • Daryl C. Chrzan, Ali Javey

Research output: Contribution to journalArticlepeer-review

Abstract

The III-V compound semiconductors exhibit superb electronic and optoelectronic properties. Traditionally, closely lattice-matched epitaxial substrates have been required for the growth of high-quality single-crystal III-V thin films and patterned microstructures. To remove this materials constraint, here we introduce a growth mode that enables direct writing of single-crystalline III-Vâ €™ s on amorphous substrates, thus further expanding their utility for various applications. The process utilizes templated liquid-phase crystal growth that results in user-tunable, patterned micro and nanostructures of single-crystalline III-Vâ €™ s of up to tens of micrometres in lateral dimensions. InP is chosen as a model material system owing to its technological importance. The patterned InP single crystals are configured as high-performance transistors and photodetectors directly on amorphous SiO 2 growth substrates, with performance matching state-of-the-art epitaxially grown devices. The work presents an important advance towards universal integration of III-Vâ €™ s on application-specific substrates by direct growth.

Original languageEnglish
Article number10502
JournalNature communications
Volume7
DOIs
Publication statusPublished - 2016 Jan 27

All Science Journal Classification (ASJC) codes

  • General Chemistry
  • General Biochemistry,Genetics and Molecular Biology
  • General Physics and Astronomy

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