Abstract
In this paper, we propose a new method for preparing high-density nanometer-scale SiGe quantum dots on ordered mesoporous sol gel silica-coated Si substrate. It was found that a SiGe dot matrix has formed in the porous silica media, and a second layer of bigger overgrown SiGe dots was also observable. X-Ray diffraction measurements suggest the formation of the buried dots. Preliminary photoluminescence experiments show promising emission related to the buried dots.
Original language | English |
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Pages (from-to) | 76-80 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 321 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 1998 May 26 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry