Direct metal imprinting lithography based on pulsed laser heating

Yung-Chun Lee, Chun Hung Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages113-116
Number of pages4
DOIs
Publication statusPublished - 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07-06-1007-06-14

Fingerprint

Laser heating
Pulsed lasers
Lithography
Etching
Chromium
Metallic films
Substrates
Metals
Nanotechnology
Printing
Masks
Laser pulses
Infrared radiation
Lasers
Experiments

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Lee, Y-C., & Chen, C. H. (2007). Direct metal imprinting lithography based on pulsed laser heating. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 113-116). [4300084] https://doi.org/10.1109/SENSOR.2007.4300084
Lee, Yung-Chun ; Chen, Chun Hung. / Direct metal imprinting lithography based on pulsed laser heating. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 113-116
@inproceedings{9b6d3efa2bbf4706b74eaa0578b653bb,
title = "Direct metal imprinting lithography based on pulsed laser heating",
abstract = "This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.",
author = "Yung-Chun Lee and Chen, {Chun Hung}",
year = "2007",
doi = "10.1109/SENSOR.2007.4300084",
language = "English",
isbn = "1424408423",
pages = "113--116",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

}

Lee, Y-C & Chen, CH 2007, Direct metal imprinting lithography based on pulsed laser heating. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300084, pp. 113-116, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07-06-10. https://doi.org/10.1109/SENSOR.2007.4300084

Direct metal imprinting lithography based on pulsed laser heating. / Lee, Yung-Chun; Chen, Chun Hung.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 113-116 4300084.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Direct metal imprinting lithography based on pulsed laser heating

AU - Lee, Yung-Chun

AU - Chen, Chun Hung

PY - 2007

Y1 - 2007

N2 - This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.

AB - This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.

UR - http://www.scopus.com/inward/record.url?scp=50049103423&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50049103423&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2007.4300084

DO - 10.1109/SENSOR.2007.4300084

M3 - Conference contribution

AN - SCOPUS:50049103423

SN - 1424408423

SN - 9781424408429

SP - 113

EP - 116

BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

ER -

Lee Y-C, Chen CH. Direct metal imprinting lithography based on pulsed laser heating. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 113-116. 4300084 https://doi.org/10.1109/SENSOR.2007.4300084