Direct metal imprinting lithography based on pulsed laser heating

Yung Chun Lee, Chun Hung Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages113-116
Number of pages4
DOIs
Publication statusPublished - 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period07-06-1007-06-14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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