Direct oxidation of si1-xGex layers using vacuum-ultra-violet light radiation in oxygen

Liang Po Chen; Yuen Chang Chan; Shoou Jinn Chang; Guo Wei Huang; Chun Yen Chang

Direct oxidation of si_1-xGe_x layers using vacuum-ultra-violet light radiation in oxygen

Liang Po Chen, Yuen Chang Chan, Shoou Jinn Chang, Guo Wei Huang, Chun Yen Chang

Research output: Contribution to journal › Article

Abstract

Oxidation of Si_1-xGe_x films has been carried out by direct photo chemical vapor deposition (direct photo-CVD) directly with activated O₂ induced by Vacuum-Ultra-Violet (VUV) light radiation. The Auger electron spectroscopy profiles show that no Ge-pileup layer at the oxide/Si_1-xGe_x interface is observed after VUV-induced Si_1-xGe_x oxidation process. The X-ray photoelectron spectroscopy analysis of the samples reveals that Si and Ge are oxidized simultaneously in oxidation process and a mixed oxide layer consisting both SiO₂ and GeO₂ is formed. This might be the reason that Ge pileup effect is eliminated in this study.

Original language	English
Pages (from-to)	L122-L124
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	37
Issue number	2 PART A
Publication status	Published - 1998 Feb 1

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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title = "Direct oxidation of si1-xGex layers using vacuum-ultra-violet light radiation in oxygen",

abstract = "Oxidation of Si1-xGex films has been carried out by direct photo chemical vapor deposition (direct photo-CVD) directly with activated O2 induced by Vacuum-Ultra-Violet (VUV) light radiation. The Auger electron spectroscopy profiles show that no Ge-pileup layer at the oxide/Si1-xGex interface is observed after VUV-induced Si1-xGex oxidation process. The X-ray photoelectron spectroscopy analysis of the samples reveals that Si and Ge are oxidized simultaneously in oxidation process and a mixed oxide layer consisting both SiO2 and GeO2 is formed. This might be the reason that Ge pileup effect is eliminated in this study.",

author = "Chen, {Liang Po} and Chan, {Yuen Chang} and Chang, {Shoou Jinn} and Huang, {Guo Wei} and Chang, {Chun Yen}",

year = "1998",

month = feb,

day = "1",

language = "English",

volume = "37",

pages = "L122--L124",

journal = "Japanese Journal of Applied Physics, Part 2: Letters",

issn = "0021-4922",

number = "2 PART A",

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TY - JOUR

T1 - Direct oxidation of si1-xGex layers using vacuum-ultra-violet light radiation in oxygen

AU - Chen, Liang Po

AU - Chan, Yuen Chang

AU - Chang, Shoou Jinn

AU - Huang, Guo Wei

AU - Chang, Chun Yen

PY - 1998/2/1

Y1 - 1998/2/1

N2 - Oxidation of Si1-xGex films has been carried out by direct photo chemical vapor deposition (direct photo-CVD) directly with activated O2 induced by Vacuum-Ultra-Violet (VUV) light radiation. The Auger electron spectroscopy profiles show that no Ge-pileup layer at the oxide/Si1-xGex interface is observed after VUV-induced Si1-xGex oxidation process. The X-ray photoelectron spectroscopy analysis of the samples reveals that Si and Ge are oxidized simultaneously in oxidation process and a mixed oxide layer consisting both SiO2 and GeO2 is formed. This might be the reason that Ge pileup effect is eliminated in this study.

AB - Oxidation of Si1-xGex films has been carried out by direct photo chemical vapor deposition (direct photo-CVD) directly with activated O2 induced by Vacuum-Ultra-Violet (VUV) light radiation. The Auger electron spectroscopy profiles show that no Ge-pileup layer at the oxide/Si1-xGex interface is observed after VUV-induced Si1-xGex oxidation process. The X-ray photoelectron spectroscopy analysis of the samples reveals that Si and Ge are oxidized simultaneously in oxidation process and a mixed oxide layer consisting both SiO2 and GeO2 is formed. This might be the reason that Ge pileup effect is eliminated in this study.

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VL - 37

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JO - Japanese Journal of Applied Physics, Part 2: Letters

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