Direct patterning of crystallized BaTiO3 and TiO2 films in aqueous solutions

Tomoaki Watanabe, Masahiro Yoshimura

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A direct patterning instrument and technique were developed that enabled direct fabrication of ceramic film patterns at room temperature, using laser beam activation of the interface between the substrate and an aqueous solution. It was shown that a crystallized BaTiO3 pattern could be fabricated on a titanium substrate with a laser pattern generator, without heat treatment afterwards. The BaTiO3 pattern had a line width of several tens of micrometers. The technique was also used to demonstrate the possibility of fabricating a TiO2 line, several micrometers wide, on a silicon wafer.

Original languageEnglish
Pages (from-to)2696-2699
Number of pages4
JournalThin Solid Films
Volume515
Issue number4
DOIs
Publication statusPublished - 2006 Dec 5

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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