Display compatible pMUT device for mid air ultrasound gesture recognition

C. H. Huang, L. Demi, G. B. Torri, S. Mao, M. Billen, Y. Jeong, D. Cheyns, X. Rottenberg, V. Rochus

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, the design, modeling, and characterization of a display compatible pMUT platform dedicated for mid air ultrasound gesture recognition is presented. A FEM model has been built using COMSOL for evaluating the frequency response, static profile, acoustic pressure, and driving efficiency of our pMUT device across all vibration modes of circular plates. In parallel with it, a first mode analytical model has been developed including electrical, mechanical, and acoustic domains to provide fast estimation for future design. A laser Doppler vibrometer is used to measure the frequency response, displacement, velocity as well as mode shapes of pMUTs with different designs in the air. Besides, an optical profilometer and impedance meter are used to check the static profile and electrical impedance of devices of different sizes, respectively. Finally, a standard reference microphone is used to measure the acoustic pressure of a pMUT inside its frequency range (<125 kHz). The measured resonance frequency of the first mode across 121.5kHz to 1.16MHz with radius from 500um to 120um fits the prediction of FEM and analytical models. The measurements of the acoustic pressure on the transverse axis of a 500um pMUT also fit the values from the acoustic analytical model.

Original languageEnglish
Title of host publicationTechConnect Briefs 2018 - Informatics, Electronics and Microsystems
EditorsMatthew Laudon, Fiona Case, Bart Romanowicz, Fiona Case
PublisherTechConnect
Pages161-164
Number of pages4
ISBN (Electronic)9780998878256
Publication statusPublished - 2018 Jan 1
Event11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference - Anaheim, United States
Duration: 2018 May 132018 May 16

Publication series

NameTechConnect Briefs 2018 - Advanced Materials
Volume4

Other

Other11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference
Country/TerritoryUnited States
CityAnaheim
Period18-05-1318-05-16

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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