DLTS MEASUREMENT OF BULK DENSITY OF GAP STATES IN PLASMA ENHANCED CVD AMORPHOUS SILICON.

C. Y. Chang, Y. K. Fang, W. C. Hsu, W. L. Lin

Research output: Contribution to conferencePaperpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages357-367
Number of pages11
Publication statusPublished - 1981

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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