DNA hybridization measurement by self-sensing piezoresistive microcantilevers in CMOS biosensor

S. M. Yang, C. Chang, T. I. Yin, P. L. Kuo

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)


Understanding the mechanism of how biological reactions produce mechanical loadings is fundamental to biomedical developments. A CMOS biosensor chip is developed to measure in situ the induced surface stress change by DNA hybridization. For 20-mer thiol-modified single stranded DNA (ssDNA), the mechanism of ssDNA attached to gold surface via a sulfur-gold linkage can be investigated by using the Langmuir adsorption model. Experimental results indicate that the immobilization response is less than 1 s, the total number of ssDNA molecules on the cantilever is about 3 × 1011, and the induced surface stress is 0.15 N/m. The surface stress sensitivity of the sensor is about 3.5 × 10-5 m/N. The estimated adsorption rate of the ssDNA is 0.005 s-1. The biosensor is capable of discriminating complimentary molecular targets and thus may provide a powerful platform for high throughput real-time analysis of DNA.

Original languageEnglish
Pages (from-to)674-681
Number of pages8
JournalSensors and Actuators, B: Chemical
Issue number2
Publication statusPublished - 2008 Mar 28

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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