Dry silver electromigration process to fabricate optical waveguides on glass substrates

Wen-Kuei Chuang, Chin C. Lee

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

An improved method to fabricate low-loss waveguides on glass without the use of molten salts or liquid solutions is presented. The method encompasses a dry silver ion migration process assisted by applied electric field.

Original languageEnglish
Pages (from-to)1511-1514
Number of pages4
JournalProceedings - Electronic Components and Technology Conference
Publication statusPublished - 2000

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Electric losses
Electromigration
Optical waveguides
Silver
Molten materials
Salts
Electric fields
Ions
Glass
Liquids
Substrates

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

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