Dual-confocal auto-focus sensing system in ultrafast laser application

Yung Hsing Wang; Pin Hao Hu; Yang Cheng Lin; Shun Sheng Ke; Yu Hsiu Chang; Chien Sheng Liu; Ji Bin Horng

doi:10.1109/ICSENS.2010.5690156

Dual-confocal auto-focus sensing system in ultrafast laser application

Yung Hsing Wang, Pin Hao Hu, Yang Cheng Lin, Shun Sheng Ke, Yu Hsiu Chang, Chien Sheng Liu, Ji Bin Horng

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.

Original language	English
Title of host publication	IEEE Sensors 2010 Conference, SENSORS 2010
Pages	486-489
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2010.5690156
Publication status	Published - 2010 Dec 1
Event	9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States Duration: 2010 Nov 1 → 2010 Nov 4

Publication series

Name	Proceedings of IEEE Sensors

Other

Other	9th IEEE Sensors Conference 2010, SENSORS 2010
Country/Territory	United States
City	Waikoloa, HI
Period	10-11-01 → 10-11-04

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2010.5690156

Cite this

@inproceedings{f319ef0880e740eba1d9386b83cdca95,

title = "Dual-confocal auto-focus sensing system in ultrafast laser application",

abstract = "A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.",

author = "Wang, {Yung Hsing} and Hu, {Pin Hao} and Lin, {Yang Cheng} and Ke, {Shun Sheng} and Chang, {Yu Hsiu} and Liu, {Chien Sheng} and Horng, {Ji Bin}",

year = "2010",

month = dec,

day = "1",

doi = "10.1109/ICSENS.2010.5690156",

language = "English",

isbn = "9781424481682",

series = "Proceedings of IEEE Sensors",

pages = "486--489",

booktitle = "IEEE Sensors 2010 Conference, SENSORS 2010",

note = "9th IEEE Sensors Conference 2010, SENSORS 2010 ; Conference date: 01-11-2010 Through 04-11-2010",

}

Wang, YH, Hu, PH, Lin, YC, Ke, SS, Chang, YH, Liu, CS & Horng, JB 2010, Dual-confocal auto-focus sensing system in ultrafast laser application. in IEEE Sensors 2010 Conference, SENSORS 2010., 5690156, Proceedings of IEEE Sensors, pp. 486-489, 9th IEEE Sensors Conference 2010, SENSORS 2010, Waikoloa, HI, United States, 10-11-01. https://doi.org/10.1109/ICSENS.2010.5690156

TY - GEN

T1 - Dual-confocal auto-focus sensing system in ultrafast laser application

AU - Wang, Yung Hsing

AU - Hu, Pin Hao

AU - Lin, Yang Cheng

AU - Ke, Shun Sheng

AU - Chang, Yu Hsiu

AU - Liu, Chien Sheng

AU - Horng, Ji Bin

PY - 2010/12/1

Y1 - 2010/12/1

N2 - A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.

AB - A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.

UR - http://www.scopus.com/inward/record.url?scp=79951875512&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79951875512&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2010.5690156

DO - 10.1109/ICSENS.2010.5690156

M3 - Conference contribution

AN - SCOPUS:79951875512

SN - 9781424481682

T3 - Proceedings of IEEE Sensors

SP - 486

EP - 489

BT - IEEE Sensors 2010 Conference, SENSORS 2010

T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010

Y2 - 1 November 2010 through 4 November 2010

ER -

Dual-confocal auto-focus sensing system in ultrafast laser application

Abstract

Publication series

Other

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this