Dual-confocal auto-focus sensing system in ultrafast laser application

Yung Hsing Wang, Pin Hao Hu, Yang Cheng Lin, Shun Sheng Ke, Yu Hsiu Chang, Chien Sheng Liu, Ji Bin Horng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.

Original languageEnglish
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages486-489
Number of pages4
DOIs
Publication statusPublished - 2010 Dec 1
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: 2010 Nov 12010 Nov 4

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period10-11-0110-11-04

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Wang, Y. H., Hu, P. H., Lin, Y. C., Ke, S. S., Chang, Y. H., Liu, C. S., & Horng, J. B. (2010). Dual-confocal auto-focus sensing system in ultrafast laser application. In IEEE Sensors 2010 Conference, SENSORS 2010 (pp. 486-489). [5690156] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5690156