Dynamic analysis of the demolding process for PDMS microstructures with high aspect ratio

Chih-Hsing Liu, Wenjie Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This study aims to investigate several peel demolding schemes through numerical simulations for demolding of the PDMS film with high aspect ratio microstructures. Motivated by the need to improve the yield rate of our first generation, rotating arm based peel demolding system, numerical models based on the explicit dynamic finite element method are developed in order to identify a minimum stress design of the process which can minimize the maximum stress of microstructures during demolding. A scale-up approach is proposed to reduce computational time for the micro-scale problems. The experimental tests are also carried out to verify the findings from numerical simulations. From this study, the roller based demolding system is identified as the optimal scheme in our analysis cases and is developed as our next generation automatic demolding system (the maximum pillar stress can reduce 20% comparing to the rotating arm scheme).

Original languageEnglish
Title of host publication2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Subtitle of host publicationMechatronics for Human Wellbeing, AIM 2013
Pages223-228
Number of pages6
DOIs
Publication statusPublished - 2013
Event2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: Mechatronics for Human Wellbeing, AIM 2013 - Wollongong, NSW, Australia
Duration: 2013 Jul 92013 Jul 12

Other

Other2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: Mechatronics for Human Wellbeing, AIM 2013
CountryAustralia
CityWollongong, NSW
Period13-07-0913-07-12

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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