Dynamic characteristics of grooved air bearings in microsystems

L. M. Chu; Wang-Long Li; R. W. Shen; T. I. Tsai

doi:10.1243/13506501JET517

Dynamic characteristics of grooved air bearings in microsystems

L. M. Chu, Wang-Long Li, R. W. Shen, T. I. Tsai

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

The performance of grooved air bearings in microsystems is analysed and discussed. The modified molecular gas lubrication (MMGL) equation is utilized as the governing equation for the gas film to include the effect of gas rarefaction. The gas rarefaction is significantly affected by two important parameters (Knudsen numbers (Kn) and accommodation coefficients (ACs)). The Poiseuille and Couette flowrate correctors (Q_P and Q_C) are introduced in the MMGL equation to extend the lubrication theory (compressible Reynolds equation) for arbitrary Kn and tangential momentum accommodation coefficients or ACs. At a specific operating condition, the transient MMGL equation is linearized by small variations in film thickness and pressure. The linearized MMGL equation is then solved by finite-element method to obtain the dynamic pressure distributions. Therefore, the dynamic coefficients (stiffness and damping coefficients) are obtained by integrating the dynamic pressure over the bearing surfaces.

Original language	English
Pages (from-to)	895-908
Number of pages	14
Journal	Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology
Volume	223
Issue number	6
DOIs	https://doi.org/10.1243/13506501JET517
Publication status	Published - 2009 Sept 1

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1243/13506501JET517

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abstract = "The performance of grooved air bearings in microsystems is analysed and discussed. The modified molecular gas lubrication (MMGL) equation is utilized as the governing equation for the gas film to include the effect of gas rarefaction. The gas rarefaction is significantly affected by two important parameters (Knudsen numbers (Kn) and accommodation coefficients (ACs)). The Poiseuille and Couette flowrate correctors (QP and QC) are introduced in the MMGL equation to extend the lubrication theory (compressible Reynolds equation) for arbitrary Kn and tangential momentum accommodation coefficients or ACs. At a specific operating condition, the transient MMGL equation is linearized by small variations in film thickness and pressure. The linearized MMGL equation is then solved by finite-element method to obtain the dynamic pressure distributions. Therefore, the dynamic coefficients (stiffness and damping coefficients) are obtained by integrating the dynamic pressure over the bearing surfaces.",

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AU - Chu, L. M.

AU - Li, Wang-Long

AU - Shen, R. W.

AU - Tsai, T. I.

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N2 - The performance of grooved air bearings in microsystems is analysed and discussed. The modified molecular gas lubrication (MMGL) equation is utilized as the governing equation for the gas film to include the effect of gas rarefaction. The gas rarefaction is significantly affected by two important parameters (Knudsen numbers (Kn) and accommodation coefficients (ACs)). The Poiseuille and Couette flowrate correctors (QP and QC) are introduced in the MMGL equation to extend the lubrication theory (compressible Reynolds equation) for arbitrary Kn and tangential momentum accommodation coefficients or ACs. At a specific operating condition, the transient MMGL equation is linearized by small variations in film thickness and pressure. The linearized MMGL equation is then solved by finite-element method to obtain the dynamic pressure distributions. Therefore, the dynamic coefficients (stiffness and damping coefficients) are obtained by integrating the dynamic pressure over the bearing surfaces.

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Dynamic characteristics of grooved air bearings in microsystems

Abstract

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