Dynamical modeling of laser ablation processes

J. N. Leboeuf, K. R. Chen, J. M. Donato, D. B. Geohegan, C. L. Liu, A. A. Puretzky, R. F. Wood

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

Several physics and computational approaches have been developed to globally characterize phenomena important for film growth by pulsed laser deposition of materials. These include thermal models of laser-solid target interactions that initiate the vapor plume; plume ionization and heating through laser absorption beyond local thermodynamic equilibrium mechanisms; gas dynamic, hydrodynamic, and collisional descriptions of plume transport; and molecular dynamics models of the interaction of plume particles with the deposition substrate. The complexity of the phenomena involved in the laser ablation process is matched by the diversity of the modeling task, which combines materials science, atomic physics, and plasma physics.

Original languageEnglish
Pages (from-to)3-14
Number of pages12
JournalMaterials Research Society Symposium - Proceedings
Volume388
Publication statusPublished - 1995 Dec 1
EventProceedings of the 1995 MRS Spring Meeting - San Francisco, CA, USA
Duration: 1995 Apr 171995 Apr 20

Fingerprint

Laser ablation
laser ablation
plumes
Physics
Atomic physics
Gas dynamics
Solid state lasers
Film growth
Materials science
Pulsed laser deposition
Ionization
Molecular dynamics
Dynamic models
Hydrodynamics
Vapors
Thermodynamics
Plasmas
Heating
atomic physics
Lasers

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Leboeuf, J. N., Chen, K. R., Donato, J. M., Geohegan, D. B., Liu, C. L., Puretzky, A. A., & Wood, R. F. (1995). Dynamical modeling of laser ablation processes. Materials Research Society Symposium - Proceedings, 388, 3-14.
Leboeuf, J. N. ; Chen, K. R. ; Donato, J. M. ; Geohegan, D. B. ; Liu, C. L. ; Puretzky, A. A. ; Wood, R. F. / Dynamical modeling of laser ablation processes. In: Materials Research Society Symposium - Proceedings. 1995 ; Vol. 388. pp. 3-14.
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Leboeuf, JN, Chen, KR, Donato, JM, Geohegan, DB, Liu, CL, Puretzky, AA & Wood, RF 1995, 'Dynamical modeling of laser ablation processes', Materials Research Society Symposium - Proceedings, vol. 388, pp. 3-14.

Dynamical modeling of laser ablation processes. / Leboeuf, J. N.; Chen, K. R.; Donato, J. M.; Geohegan, D. B.; Liu, C. L.; Puretzky, A. A.; Wood, R. F.

In: Materials Research Society Symposium - Proceedings, Vol. 388, 01.12.1995, p. 3-14.

Research output: Contribution to journalConference article

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T1 - Dynamical modeling of laser ablation processes

AU - Leboeuf, J. N.

AU - Chen, K. R.

AU - Donato, J. M.

AU - Geohegan, D. B.

AU - Liu, C. L.

AU - Puretzky, A. A.

AU - Wood, R. F.

PY - 1995/12/1

Y1 - 1995/12/1

N2 - Several physics and computational approaches have been developed to globally characterize phenomena important for film growth by pulsed laser deposition of materials. These include thermal models of laser-solid target interactions that initiate the vapor plume; plume ionization and heating through laser absorption beyond local thermodynamic equilibrium mechanisms; gas dynamic, hydrodynamic, and collisional descriptions of plume transport; and molecular dynamics models of the interaction of plume particles with the deposition substrate. The complexity of the phenomena involved in the laser ablation process is matched by the diversity of the modeling task, which combines materials science, atomic physics, and plasma physics.

AB - Several physics and computational approaches have been developed to globally characterize phenomena important for film growth by pulsed laser deposition of materials. These include thermal models of laser-solid target interactions that initiate the vapor plume; plume ionization and heating through laser absorption beyond local thermodynamic equilibrium mechanisms; gas dynamic, hydrodynamic, and collisional descriptions of plume transport; and molecular dynamics models of the interaction of plume particles with the deposition substrate. The complexity of the phenomena involved in the laser ablation process is matched by the diversity of the modeling task, which combines materials science, atomic physics, and plasma physics.

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Leboeuf JN, Chen KR, Donato JM, Geohegan DB, Liu CL, Puretzky AA et al. Dynamical modeling of laser ablation processes. Materials Research Society Symposium - Proceedings. 1995 Dec 1;388:3-14.