EB Resist characteristics of water soluble poly(siloxyethylene glycol)

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)325-328
Number of pages4
JournalJournal of Photopolymer Science and Technology
Volume10
Issue number2
DOIs
Publication statusPublished - 1997

All Science Journal Classification (ASJC) codes

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

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