Effect of a titanium interlayer on the performance of the titanium nitride diffusion barrier

Engineering & Materials Science

• Diffusion barriers 100%
• Titanium nitride 96%
• Sheet resistance 93%
• Titanium 65%
• Annealing 50%
• Metallizing 39%
• Auger electron spectroscopy 26%
• Thermodynamic stability 17%
• X ray diffraction 16%
• Thin films 16%
• Scanning electron microscopy 13%

Chemical Compounds

• Diffusion Barrier 85%
• Sheet Resistance 82%
• Nitride 65%
• Annealing 40%
• Auger Electron Spectroscopy 19%
• Thermal Stability 11%
• Scanning Electron Microscopy 10%
• X-Ray Diffraction 8%
• Liquid Film 8%
• Surface 5%

Physics & Astronomy

• titanium nitrides 82%
• interlayers 61%
• titanium 56%
• performance 29%
• annealing 17%
• barrier layers 10%
• Auger spectroscopy 9%
• electron spectroscopy 9%
• thermal stability 8%
• scanning electron microscopy 6%
• characterization 5%
• diffraction 5%