Effect of amorphous Si thickness on the formation of SiC nanoparticles during high vacuum annealing

C. K. Chung, Bo-Hsiung Wu, T. S. Chen, C. C. Peng, T. R. Shih

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a novel approach for the formation of SiC nanoparticles (np-SiC) has been demonstrated by annealing the three-layer a-Si/C/a-Si film on a Si(100) substrate. The np-SiC formation strongly depends on the amorphous Si (a-Si) thickness and annealing temperature. Both three-layer a-Si/C/a-Si structures in different thickness i.e. 50/200/50 nm and 75/150/75 nm were studied at annealing temperatures of high vacuum annealing at 500- 900°C at 10 Pa. The a-Si thickness and annealing temperature significantly affected the particle size, density, and distribution of np-SiC. No nanoparticles were formed for multilayers annealed at 500°C, while a few particles started to appear as the annealing temperature was increased to 700°C at both structures. Many np-SiC appeared at 900°C at a density order about 108 cm -2 for both structure, but the thicker a-Si structure i.e. a-Si/C/a-Si (75/150/75 nm) has a particle density approximately 1.8 times higher than a-Si/C/a-Si (50/200/50 nm). This is attributed to the variation of activation energy, surface energy and atomic mobility during reaction of Si and C at different a-Si thickness and temperature. The higher the annealing temperature, the higher the particle density. The thicker a-Si structure with higher density implies that it has lower activation energy of SiC formation than the thin a-Si structure.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages426-429
Number of pages4
DOIs
Publication statusPublished - 2007 Aug 28
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: 2007 Jan 162007 Jan 19

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period07-01-1607-01-19

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

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