Effect of annealing temperature on electrical and reliability characteristics of HfO2/porous low-k dielectric stacks

Yi Lung Cheng, Kai Chieh Kao, Giin Shan Chen, Jau Shiung Fang, Chung Ren Sun, Wen Hsi Lee

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Atomic layer deposited thin HfO2 film has been demonstrated to act as a pore-sealing layer and a Cu diffusion barrier layer used in porous low-k dielectrics. This study investigates the effect of annealing temperature on the electrical characteristics and reliability of the dielectric stacks with HfO2 and porous low-k films. The experimental results reveal that annealing improved electrical performance and reliability, but increased the dielectric constant. However, the resulting dielectric constant of the annealed HfO2/porous low-k dielectric stacks following oxygen plasma treatment was still lower than that of the dielectric stacks without annealing, indicating that annealing improved the properties of HfO2/porous low-k dielectric stacks. Annealing at 400 °C improved electrical characteristics, reliability, and Cu barrier performance more than did annealing at 600 °C because at 600 °C annealing, the grain boundaries of the crystallized HfO2 film provide a conduction path and cause the breakage of the porous low-k film. However, the HfO2/porous low-k dielectric stacks that were annealed at 600 °C exhibited greater resistance against damage by oxygen plasma.

Original languageEnglish
Pages (from-to)34-39
Number of pages6
JournalMicroelectronic Engineering
Volume162
DOIs
Publication statusPublished - 2016 Aug 16

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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