The nickel-cobalt (Ni-Co) alloy has been an important material in the MEMS or mechanical application. In this article, we investigated the effect of cobalt content on the work function (WF) variation of the electroplated Ni-Co films using a homemade Kelvin probe system. The Co atomic percentage (Co%) in the deposited films was related to the current densities. It decreased with increasing current density from 24.5 at% at 1 ASD (A/dm2) to 16.9 at% at 5 ASD. This leads to the decrease of the average measured WF of Ni-Co films with the low WF Co content from 4.974 eV at 16.9 Co% to 4.773 eV at 24.5 Co%. The sensing mechanism and analysis of Kelvin probe signal were also discussed. The in-situ nondestructive measurement using the Kelvin Probe system would be a powerful tool for future characterization of material property of micro devices.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering