Effect of dilution gas on SiCN films growth using methylamine

J. J. Wu, K. H. Chen, C. Y. Wen, L. C. Chen, Y. C. Yu, C. W. Wang, E. K. Lin

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of dilution gas on SiCN films growth using methylamine'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy