Effect of hydrogen ion beam treatment on Si nanocrystal/SiO 2 superlattice-based memory devices

Sheng Wen Fu, Hui Ju Chen, Hsuan Ta Wu, Bing Ru Chuang, Chuan Feng Shih

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


This study presents a novel route for synthesizing silicon-rich oxide (SRO)/SiO 2 superlattice-based memory devices with an improved memory window and retention properties. The SiO 2 and SRO superlattices are deposited by reactive sputtering. Specifically, the hydrogen ion beam is used to irradiate the SRO layer immediately after its deposition in the vacuum chamber. The use of the hydrogen ion beam was determined to increase oxygen content and the density of the Si nanocrystals. The memory window increased from 16 to 25.6 V, and the leakage current decreased significantly by two orders, to under ±20 V, for the hydrogen ion beam-prepared devices. This study investigates the mechanism into how hydrogen ion beam treatment alters SRO films and influences memory properties.

Original languageEnglish
Pages (from-to)134-139
Number of pages6
JournalApplied Surface Science
Publication statusPublished - 2016 Mar 30

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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